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Newport XPS - Positionercompensationphasecorrectionfiltersset

Newport XPS
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XPS Unified Programmer’s Manual
7.2.1.186 PositionerCompensationPhaseCorrectionFiltersSet
Name
PositionerCompensationPhaseCorrectionFiltersSetSets the post-feedforward
compensation phase correction filter parameters.
Input tests
- Refer to section 7.1: “Input Tests Common to all XPS Functions”.
- Checks corrector type: (-8)
- Checks parameter values: (-17)
PhaseCorrectionFn
PhaseCorrectionFd
NOTE
Refer to system.ref file to get CorrectorISRPeriod value.
Description
This functions configures the parameters defined for two post-feedforward
compensation phase correction filters.
First phase correction filter parameters:
PhaseCorrectionFn1.
PhaseCorrectionFd1.
PhaseCorrectionGain1.
Second phase correction filter parameters:
PhaseCorrectionFn2.
PhaseCorrectionFd2.
PhaseCorrectionGain2.
NOTE
If the “PhaseCorrectionFn” value = 0 or the “PhaseCorrectionFd” value = 0 then
the phase correction filter is not activated.
eriodCorrectorP
5.0
:0
eriodCorrectorP
5.0
:0
287 EDH0373En1023 01/18

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