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Newport XPS - Moveslice

Newport XPS
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XPS Unified Programmer’s Manual
7.2.2.22 MoveSlice
Name
MoveSliceExecutes a slice move on an XY group.
Input tests
- Refer to section 7.1: “Input Tests Common to all XPS Functions”.
- Verifies target position in relation with the travel limits: (-17)
- Checks the group status, it must be “READY” state: (-22)
Description
This API moves the stage to perform a “U-turn”.
The slice move begins a linear interpolation to move to (Xinter, Yend) but when the
stage has finished the constant velocity phase, the slice move changes the target position
to go to (Xend, Yend).
Prototype
int MoveSlice(
int SocketID,
double Yend_um,
double Xend_um,
double ScanAngle_urad
)
Input parameters
SocketID int Socket identifier gets by the
“TCP_ConnectToServer” function.
Yend_um double y target position in µm.
Xend_um double x target position in µm.
ScanAngle_urad double Scan angle in µrad.
615 EDH0373En1023 01/18

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