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Newport XPS - Page 630

Newport XPS
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XPS Unified Programmer’s Manual
Output parameters
None.
Return (In addition to the results of “Input Tests Common to all XPS
Functions”)
0: No error.
-5: Not allowed due to a positioner error or hardware status.
-17: Parameter out of range or incorrect.
-22: Not allowed action.
-202: Not allowed action due to an external motion interlock.
-208: Not allowed action because piston is engaged.
-1004: Zygo signal is not present.
EDH0373En1023 01/18 616

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