Newport XPS - ZYGO Interferometer; ZMI Measurement System; ZYGO P2 Interface Registers

XPS Unified Programmer’s Manual
6.5 ZYGO Interferometer
6.5.1 ZMI Measurement System
Refer to ZMI 2400 series manual - OMP 0537_F
6.5.2 ZYGO P2 Interface Registers
P2 Registers
Read
Write
Axis #1
0
Axis status
Read only
2
Position
4
Velocity
6
Time
Axis #2
8
Axis status
Read only
10
Position
12
Velocity
14
Time
General
16
Board status
Command
Info
18
Revision
Read only
20
ID
37 EDH0373En1023 — 01/18