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Newport XPS
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XPS Unified Programmer’s Manual
Output parameters
Param1 double * Motor decoupling matrix coefficient.
Param2 double * Motor decoupling matrix coefficient.
Param3 double * Motor decoupling matrix coefficient.
Param4 double * Motor decoupling matrix coefficient.
Param5 double * Motor decoupling matrix coefficient.
Param6 double * Motor decoupling matrix coefficient.
Param7 double * Motor decoupling matrix coefficient.
Param8 double * Motor decoupling matrix coefficient.
Param9 double * Motor decoupling matrix coefficient.
Return (In addition to the results of “Input Tests Common to all XPS
Functions”)
0: No error.
-19: GroupName doesn't exist or unknown command.
491 EDH0373En1023 01/18

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