Setting Measurement Items
ZFX-C User’s Manual
3
SETTING THE MEASUREMENT CONDITIONS
79
Possible output results
The following values can be output when expressions are set.
Position Difference p.50
Item Description Message
Judgment result The judgment result is output. (0:OK, -1:NG, -2: not measured) Judge (JG)
Edge width The measured edge width is output. (0 to 9999.999) Width (WD)
Edge position 1/2 The X, Y coordinates of the edge position are output.
(-9999.999 to 9999.999)
The start point side of the region becomes
Position
X1/Y1, and the
end point side becomes
Position
X2/Y2.
Position
X1, Y1, X2, Y2
(X1, Y1, X2, Y2)
Reference edge width The edge width when the measurement region is set is output.
(0 to 9999.999)
Reference width (SW)
Reference edge position
1/2
The X, Y coordinates of the edge position when the measurement
region is set are output. (-9999.999 to 9999.999)
Reference
X1, Y1, X2, Y2
(SX1, SY1, SX2, SY2)
Width difference The width difference obtained by "measurement value - reference
value" is output. (-9999.999 to 9999.999)
Width dif. (DW)
Position difference 1/2 The difference obtained by "measurement position - reference
position" is output. (-9999.999 to 9999.999)
Position dif.
X1, Y1, X2, Y2
(DX1, DY1, DX2, DY2)
Important
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