Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
25
1
– select single BSA align: F1 key
Toggle to single BSA align and enable this option.
– select alignment microscope
Activate BSA MICROSCOPE key (LED on).
– select exposure mode: SELECT PROGRAM key
Press SELECT PROGRAM key (310). Toggle
through the menu up to the desired exposure type
and confirm by pressing SELECT PROGRAM key
again.
– edit parameter: EDIT PARAMETER key
Press EDIT PARAMETER key (311) to edit the pa-
rameter for the exposure. Confirm the settings by
pressing EDIT PARAMETER key again.
– save all settings: EDIT PROGRAM key
This function is an optional possibility to save this
parameter set for the future. Toggle with the X-
ARROW keys to "SAVE Pgm.". Select with the Y-
ARROW keys a program number. Prior saved
programs to the same number will be overwritten
without warning. Save the settings by EDIT PRO
-
GRAM key (312). Existing programs can be load-
ed from here.
2. Load Mask
Attention! Microscope moves up!
– start mask loading sequence: CHANGE MASK
key
Follow the displayed instructions.
– load mask holder
For this sequence make sure the prealignment
pins and the mechanical mask clamping is re
-
moved from the mask holder.
– load mask transfer chuck and mask: ENTER key
Insert mask transfer chuck into transport slide.
Load mask face down onto mask transfer chuck.
Toggle the mask vacuum on by pressing the EN
-
TER key.
– slide the transport slide in: ENTER key
For non motorized stages only if the chuck is not
centered, move it with the micrometer screws to
the middle position. Confirm with ENTER key. Af
-
ter WEC relative to the mask holder the mask is in
100 µm alignment gap.
– alignment preparation
Enable the used single BSA microscope using the
SPLITFIELD switch (214). Adjust the microscope
illumination using the BSA/IR microscope illumi
-
nation left/right (211). Focus on the mask plane by
activating the TOP/BOTTOM key (326) and the
corresponding TOP SUBSTRATE LEFT/RIGHT
focus regulator (215). Search for a reference mask
alignment mark with the BSA microscope. Store
this stage position by activating the SET REFER
-
ENCE key (314). Search for a second mask align-
ment mark only by the x-movement of the BSA-
microscope. Toggle back to the reference align
-
ment mark using the SCAN key (315). Press
GRAB IMAGE key (327) to store the reference
alignment mark image. Toggle to the second
alignment mark using the SCAN key (315).
– mask alignment
For an motorized stage only switch the manipula-
tor control to the stage activating the STG/TSA/
BSA button (601). Adjust the real mask alignment
mark to the stored one only with the (Θ-JOY
-
STICK (605) or the (Θ-micrometer screw of the
alignment stage about 1/2 of the misalignment.
Switch the manipulator control to BSA deactivat
-
ing the STG/TSA/BSA button (601). Toggle to the
reference alignment mark using the SCAN key
(315). Press GRAB IMAGE key (327) twice to re
-
lease the stored and grab the new image. Press
SCAN key (315) to toggle to the second alignment
mark position. Repeat this mask alignment until
there is no misalignment left.
– load mask: ENTER key
Pressing ENTER the mask moves to the mask
holder and is taken by the mask holder vacuum.
Transport chuck moves down for unloading.
3. Load Substrate
– load wafer chuck and substrate onto the transport
slide: LOAD key
We recommend to use a transparent wafer
chuck. Move the loaded transport slide in and
confirm with ENTER key.
– wedge error compensation
WEC starts automatically. The substrate moves to
the alignment gap.
4. Substrate Alignment
– alignment preparation
Adjust the microscope illumination using the BSA/
IR microscope illumination left/right (211). Select
the Substrate focus plane by deactivating the
TOP/BOTTOM key (326). Focus by the BOTTOM
SUBSTRATE LEFT/RIGHT focus regulator (216).
Search for a reference wafer alignment mark with
the BSA microscope. Store this stage position by
activating the SET REFERENCE key (314). Search
for a second wafer alignment mark only by the x-
movement of the BSA-microscope. Toggle back
to the reference alignment mark using the SCAN
key (315). Press GRAB IMAGE key (327) to store
the reference alignment mark image. Toggle to
To Next Page
Loading...
