SUSS MA6 - Page 4

Contents
MA6 / MA8 - Contents - Rev.05 07-06
I
II
2.1.1 General Maintenance ............................................................................................ 39
2.1.2 Visual Checks ....................................................................................................... 39
2.1.3 Test Run ............................................................................................................... 39
2.1.4 Safety System Check ........................................................................................... 39
2.2 Preventive Maintenance for MA6/ MA8 ............................................................................. 39
2.2.1 Cleaning ............................................................................................................... 39
2.2.2 Lamp Service ....................................................................................................... 40
2.2.3 Greasing ............................................................................................................... 40
2.2.4 WEC-Check ......................................................................................................... 40
2.2.5 Recommended SUSS Service .............................................................................. 40
2.3 Measuring the Intensity/ Uniformity of the Exposure Light ................................................. 40
2.3.1 Power Supply Calibration ...................................................................................... 40
2.3.2 Alignment of Lamp in Ellipsoid Mirror .................................................................... 41
2.4 Replacement of the Exposure Lamp 1000 W .................................................................... 43
2.4.1 Replacement Procedure ....................................................................................... 43
2.4.2 Adjusting the Exposure Lamp ............................................................................... 43
2.4.3 N2-Control ........................................................................................................... 45
2.4.4 Exhaust Flow Control (in Lamp house Intake Tube) ............................................... 45
2.4.5 Use of Other Lamps ............................................................................................. 45
2.4.6 Lamp House 350W and 350W Lamp Replacement .............................................. 45
2.5 Replacement of the Microscope Lamp ............................................................................. 46
2.6 Cleaning of Optical Components ...................................................................................... 47
2.6.1 Cleaning Materials ................................................................................................ 48
2.6.2 Application Technique .......................................................................................... 48
2.6.3 Cleaning Procedure .............................................................................................. 48
2.6.4 Safe Clean-up after Use of Solvents ..................................................................... 50
2.6.5 Removal and Re-Insertion of Specific Optical Components .................................. 50
2..6.6 Conclusion ........................................................................................................... 51
2.7 Facts and Data for Maintenance and Service .................................................................... 51
2.7.1 Consumables ....................................................................................................... 51
2.7.2 Hazardous Materials and Solid Waste .................................................................. 52
2.7.3 Service Exchange of Heavy Subassemblies ......................................................... 52
2.7.4 Supplier’s Contact ................................................................................................ 52
3 Appendix ......................................................................................................... 53
3.1 Parameter Ranges and Default Settings ........................................................................... 53
3.2 List of Abbreviations ....................................................................................................... 55
3.3 Spare Parts Llist (Extract) ................................................................................................. 57
3.4 Lock-Out / Tag-Out Checklist .......................................................................................... 63
3.5 Schematics of the Pneumatic System .............................................................................. 65
3.6. Schematics of the Electronic System MA6/8 BA6/8........................................................... 82
3.7 Service Information .......................................................................................................... 84
3.7.1 Subassemblies: MA8; MA6; MA6/BA6; BA6; MA6/BA6-ISA; ............................... 84
3.7.2 Overview for Valves, Throttles, Sensors, etc. ....................................................... 85
3.8 International Chemical Safety Cards ................................................................................. 95