Advanced Operation Manual 3
Contents
1 Programming
Run Time Programming 12
Using run time events 12
Programming run time events 13
The run table 13
Adding events to the run table 13
Editing events in the run table 14
Deleting run time events 14
Clock Time Programming 15
Using clock time events 15
Programming clock time events 15
Adding events to the clock table 16
Editing clock time events 16
Deleting clock time events 16
User-Key Programming 17
To program a User Key 17
To play back (execute) the stored keystrokes 17
To erase the stored keystrokes 17
Post Run Programming 18
To enable a post run program 18
To disable a post run program 18
2 Flow and Pressure Modules
About Flow and Pressure Control 20
Maximum operating pressure 20
PIDs 21
Inlet Modules 22
Detector Modules 23
Pressure Control Modules 24
Auxiliary Pressure Controllers 27
Restrictors 28
Examples 30
1. Using an Aux EPC channel to supply purge gas to a splitter 30
2. Using the PCM channels 30