Chapter 3 HYBRID Coater Service Manual ver1.1
22
3.12 ZØ Movement at HC-200
Two stepper motors are used for these movements. The bottom one is the one for the Z and
the upper one for the rotation. Both
stepper motors are not directly
coupled to the spline shaft.
The Ø stepper motor is mounted on
a gear which has a 10:1 ratio. On
the output shaft a pulley of 44 teeth
is mounted. The pulley on the Ø part
of the spline shaft has 72 teeth. One
revolution of the stepper motor gives
a rotation of 33 / (73*10) * 360 =
16.73 degrees.
The Z stepper motor contains a
pulley with 22 teeth. The pulley on
the Z-part of the spline shaft has 72
teeth. One rotation of the stepper
motor gives a Z movement of 22 / 72
* 25 = 7.639mm.
Spare parts:
EL-02527 Inductive proximity switch M8
EL-07164 Vane switch of photo interrupter OPB815W
EL-07183 Three channel encoder module
HC-200-SS-80 Encoder disc 2” 2500lines with Index
HC-100-SS-53 Stepper motor SECM-268-E3.0A with connector