HYBRID Coater Service Manual ver1.1 Chapter 9
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9. Loosen the union nut of the camera cable on the fixed head.
10. Loosen the union nut of the camera cable on the rotating head.
11. Loosen the four bolts which hold the cover plate of the grounding strip to the fixed head
and remove this.
12. Loosen the two bolts which hold the cover of the grounding strip to the rotating head.
Now you can remove the complete flexible duct.
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