Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 44
3
INSTALLATION
UP DOWN
Levitation NORM:*****rpm
Remote Mode
xxxxx rpm
Remote Mode
COM1
Remote Mode
COM2
Remote Mode
STP-Link
Speed Set Point
xxxxx rpm
Speed Set Point
xxxxx rpm
TMS Function
DISABLE
TMS Function
ENABLE
TMS Function
External
TMS Function
Advanced
Inhibit Command
DISABLE
Inhibit Command
ENABLE
Second Damage Limit
DISABLE
Second Damage Limit
ENALBE
J
UP
＋
A
B
C
D
E
I

SELECT
ENTER
SELECT
2nd Speed Option
DISABLE
2nd Speed Option
ENABLE - Parallel
2nd Speed Option
ENABLE - Serial
F
LEAK VALVE Option
DISABLE
LEAK VALVE Option
ENABLE
H
2nd Speed Set Point
xxxxx rpm
2nd Speed Set Point
xxxxx rpm
G
Figure 28 - Parameter setting method
A.
Operation mode
F.
Second speed function setting
B.
Select remote mode
G.
Second speed setting
C.
Rated speed setting
H.
Emergency vent valve setting
D.
TMS function setting
I.
Second Damage Limit setting
E.
INHIBIT function setting
J.
To Warning function setting