Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 57
4
OPERATION
Software Version
95 * *.*
A
Autotest
2023/MAY/20 15:40
Autotest
STP-XA2703/XA3203
Autotest complete
Levitation
TMS TEMP : **
ACCEL: ***00rpm
TMS TEMP : **
NORM : ***00rpm
TMS TEMP : **
BRAKE: ***00rpm
TMS TEMP : **
B
C
D
E
F
G
H
I
J
K
Levitation
(Sensor Name) : **
Levitation
(Sensor Name) : **
Levitation
(Sensor Name) : **
Levitation
(Sensor Name) : **
UP
UP
UP DOWN
DOWN
DOWN
DOWN
UP
O
N
M
L
*1
Figure 35 - Operational procedures
A.
MAIN POWER "ON"
F.
Levitation State
Upper: Levitation state
Lower: TMS actual temp
(for only with TMS unit)
J.
Start operation of the STP
pump
B.
Version
C.
Self test
Upper: Autotest
Lower: Date
G.
Acceleration State
Upper: Acceleration state
Lowe: TMS actual temp
(for only with TMS unit)
K.
Stop operation of the STP
pump
D.
Self test
Upper: Autotest
Lower: Model of
connected pump
H.
Normal Operation State
Upper: Normal operation state
Lower: TMS actual temp
(for only with TMS unit)
L.
Input channel 1
M.
Input channel 2
E.
Self test completed
(upper only)
I.
Break State
Upper: Brake state
Lower: TMS actual temp
(for only with TMS unit)
N.
Input channel 3
O.
Input channel 4
*1 In case of the External TMS specification, press "UP"/"DOWN" switches on the front panel to select the input channel of the
temperature sensors.