SCU-1601 Control Unit for Turbomolecular Pump
Pins for optional signal output.
The emergency vent valve (optional accessory) can be
connected. These pins are closed while this valve functions.
In state of the emergency vent valve function is "ENABLE",
the pins between (7)-(26) are closed and the pins between
(37)-(26) are opened.
In state of the second speed option is "ENABLE", and second
rating speed is selected, the pins between (7)-(26) are closed
and the pins between (37)-(26) are opened.
Table 11 - X7 REMOTE output signal pins (continued)
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