SCU-1601 Control Unit for Turbomolecular Pump
Pins for the WARNING signal output. When the WARNING
message is displayed on the LCD, the pins between (24)-(6)
are closed and the pins between (25)-(6) are opened.
Pins for outputting the STP pump REMOTE SELECTION state
signal.
When the MANUAL/REMOTE changeover switch on the front
panel is set to ON (remote side), these pins are closed
("REMOTE" operation).
Pins for outputting the POWER ON state signal.
These pins are closed when magnetic bearing functions and
the rotor levitates. This output is opened at a power failure.
Pins for outputting the ACCELERATION state signal.
These pins are closed when the STP pump is in acceleration.
Pins for outputting the NORMAL OPERATION state signal.
When the STP pump is in rated operation, the pins between
(11)-(30) are closed, and the pins between (12)-(30) are
opened.
Pins for outputting the BRAKE state signal.
These pins are closed when the STP pump is in brake.
Pins for outputting the ALARM signal.
When an abnormality/error is detected under the POWER ON
state, the pins between (14)-(33) are closed, and the pins
between (15)-(33) are opened.
Pins for the TMS unit rated state signal output.
When the actual temperature of all defined sensors in TMS unit
within the rated range (in case of the built-in TMS unit, the
rated range is the setting temperature range +/-10°C), the pins
between (16)-(17) are closed and the pins between (35)-(17)
are opened.
Table 10 - X7 REMOTE output signal pins
To Next Page
Loading...
