Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 65
4
OPERATION
(24)
(6)
(25)
CR1
CR1
WARNING
N.O OUT
N.C OUT
COM
A
CR2
(9)
(29)
(30)
(10)
(28)
(11)
(27)
(8)
(12)
(13)
(14)
(32)
(33)
(15)
CR3
CR4
CR5
CR5
CR6
CR7
CR7
REMOTE
N.O OUT
N.O OUT
N.O OUT
COM
POWER
ACCELERTION
NORMAL
BRAKE
ALARM
N.O OUT
N.O OUT
N.C OUT
N.C OUT
COM
B
C
D
E
F
G
N.O OUT
(16)
(17)
(35)
CR8
CR8
AT TEMP.
N.O OUT
N.C OUT
COM
H
(7)
(26)
(37)
CR9
CR9
N.O OUT
N.C OUT
I
COM
OPT OUT
A.
WARNING state
signal output pins
F.
BRAKE state
signal output pins
B.
REMOTE selection state
signal output pins
G.
ALARM state
signal output pins
C.
POWER ON state
signal output pins
H.
TMS unit rated state
signal output pins
D.
ACCELERATION state
signal output pins
I.
Optional signal output pins
(Emergency vent valve open
signal output pins)
E.
NORMAL OPERATION state
signal output pins
Figure 37 - X7 REMOTE output signal pins