Edwards STP-iS1607 Series - Page 139

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 125
5
SERIAL COMMUNICATION PROTOCOL
Parameter
6a
6b
6c
6d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
7a
7b
[Omitted]
21d
ASCII
F
F
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
Parameter
22a
22b
22c
22d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
*1
System reservation