Edwards STP-iS1607 Series

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STP-iS1607 Series Turbomolecular Pump

MT-94E-001-C

Page 154

MAINTENANCE AND INSPECTION

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Main Page

Table of Contents7
Introduction15
Scope and Definitions15
Electromagnetic Compatibility16
Limited Warranty16
Item Warranted16
Disclaimer17
Spare Parts17
Precautions for Safe Operation of the STP Pump18
Usable Gases18
STP Pump Installation Warning Label19
Hot Surface Warning Label19
Maintenance and Inspection Precautions19
Labels19
Heavy Product Caution Label20
High Voltage Device Caution Label20
Operation Principle of the STP Pump21
STP Pump Specification23
Technical Data25
STP Pump Specifications25
Maximum Gas Flow-Rate27
Water Cooling Use Condition28
Control Unit29
External Appearance of STP-Is1607/Is1607C/Is1607B31
External Appearance of the STP Pump31
External Appearance of STP-Is1607S/Is1607Cs/Is1607Bs32
Label Affixing Positions33
Installation of the Stp Pump35
Precautions before Installation35
Operating Environment35
Space Around the STP Pump37
Installation Area37
Bench38
Insulation Test38
Example of Lifting the STP Pump39
- Eye Nut Size39
Unpacking and Installation39
Example of Lifting the STP Pump (Horizontal Positioning)40
STP Pump with Eyebolts42
Configuration of the STP Pump43
Control Unit (Front Panel)43
- Pump Functions43
Name and Function of each Part43
Name and Function of the Pump43
Name and Function of the Control Unit44
- Control Unit Front Panel Functions46
- Control Unit Front Panel Functions (Continued)47
Installation of the STP Pump to the Vacuum Equipment48
How to Install the STP Pump48
Cleaning the Seal49
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump50
STP Pump Installation Positions50
Secure the STP Pump51
- Tightening Torque of Bolt51
- Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange52
Screw Holes for Securing the Base56
Legs for Securing the Base56
Power Cable57
How to Connect the Power Cable59
Precautions of Vacuum Piping61
Vacuum Piping Method62
Height of Purge Port63
Positions of the Cooling Water Port64
Connecting the Water Cooling Pipe64
Attaching a Baking Heater65
Connecting to Semiconductor Equipment66
Connecting to Power66
Emergency off Circuit (EMO Circuit)66
Operation67
Gas Pumping, Cooling and Baking the STP Pump67
Gas Pumping67
How to Introduce a Purge Gas68
Cooling the STP Pump68
Water-Cooling Method68
Baking the STP Pump69
Before Starting the STP Pump70
Confirmation before Starting70
Confirmation of Vacuum System70
Powering on71
Pump Operation71
Input Operation Port Setting71
Starting/Stopping the STP Pump72
Pump Operation Method72
- Starting/Stopping the STP Pump (X2 REMOTE)72
How to Start/Stop the STP Pump73
Starting the STP Pump after Stopping73
Starting the STP Pump after a Safety Function Operates73
Powering off73
- Reset Operation (X2 REMOTE)73
Led74
X2 REMOTE Connector75
- X2 REMOTE Input Signal Pins76
Parallel Port Input/Output Signal75
Input Signal Pins75
X2 REMOTE Input Signal Pins (Contact Input)77
Input Operation Port Setting78
Second Speed Option79
- Second Speed Function79
Output Signal Pins80
- X2 REMOTE Output Signal Pins81
X2 REMOTE Output Signal Pins82
Serial Communication Protocol85
Introduction85
Connection and Setting up86
Signal Connection86
- X3 Pin Position86
Connecting the RS48588
Communication Parameter Setting89
- Communication Parameters89
Serial Port90
- Input Operation Port90
Input Operation Port Setting90
Serial Communication Timeout Setting91
- Serial Communication Time out Setting91
Grounding Example (both Ends Grounding)92
Grounding Example (Single Point Grounding)92
Recommended Items about Communication Cable Installation92
Protocol Specifications95
General Description95
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)96
- (In the RS232/RS485 Single Point Connection)97
Query Command98
- (In the RS232/RS485 Single Point Connection)98
Transmission Data Format99
Frame Control (Checksum)100
Error Control100
Transmission Frame in the RS485 Multi-Point Connection100
Control Command in the RS485 Multi-Point Connection102
5.3.10 Query Command in the RS485 Multi-Point Connection103
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection104
- Pump Operation Commands104
5.3.12 Application Note105
Example of Answer Resending Process106
Example of Command Sending During Answer Data Reply106
Command Specifications109
Command List109
Readmeas110
Command110
Readfailmess111
- Pump Operation Commands111
- Error Message Values113
- Error Message Values (Continued)114
Readmodfonct115
- Pump Operation Mode116
Readversion117
Readcounters118
Readsetpoint119
Readmotortemp119
5.4.10 Readstatus120
5.4.11 Readevents121
- Remote Mode121
5.4.12 Setspeedsetpoint122
5.4.13 Readspeedsetpoint123
5.4.14 Readmodfonctwithwarning124
5.4.15 Readmeasvalue127
5.4.16 Readoptionfunc129
5.4.17 Setoptionfunc132
5.4.18 Readcondition134
5.4.19 Readeventswithtime136
5.4.20 Setoptions140
Second Speed Option Setting140
- Option Function Number and Parameter List140
Second Speed Selection141
5.4.21 Readoptions142
Second Speed Function Setting142
Second Speed Select143
Stp-Link and Display Unit145
STP-Link145
Display Unit146
Safety Functions147
Power Failure147
Operation after a Power Recovery148
- States of Leds and X2 REMOTE Output Signals at Power Failure148
Abnormal State of Magnetic Bearing (Disturbance)149
Excessive Vibration (Disturbance)149
Motor Driver Overload (DRV Overload)149
Overheating Inside the STP Pump (MOTOR Overheat)149
Overheating Inside the Control Unit (CNT Overheat)149
Overspeed150
WARNING" Function150
- WARNING Function150
Contents of WARNING Function152
First Damage Limit152
Second Damage Limit152
Pump Run Time over152
Pump Overload153
Imbalance153
Other Warning153
WARNING Function Setting154
- Default Setting of WARNING Function154
- Factory Setting and Variable Range154
Troubleshooting Immediately after Failure Occurs155
After Power Failure155
After Other Abnormality/Error155
Troubleshooting156
Indication of "FAILURE" LED (Red)156
Indication of "FAILURE" LED (Green)162
No Indication of the "FAILURE" LED162
Maintenance and Inspection163
Cleaning164
Inspecting the Deposit164
Maintenance165
Recommended Overhaul Intervals165
Standard Replacement Parts165
Recommended Maintenance Intervals for Main Parts166
Transporting for Repair or Overhaul167
Storage and Disposal169
Storage of the STP Pump169
Disposal170
Service, Spares and Accessories171
Introduction171
Service171
Spares171
Accessories172

Edwards STP-iS1607 Series - Page 168

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