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Hitachi TM3000 - Page 139

Hitachi TM3000
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NOTE : If the rotation is not 0°, the direction in which the image moves vary. Therefore,
first set the rotation to 0°, move the FOV, and then use the rotation to rotate the
image.
(2) Manual Stage To move the FOV extensively, adjust the mouse cursor to mark on
the observation screen and hold the left mouse button down.
To move it finely, use the image shift.
When moving the FOV for a high-magnification observation (x5,000 or higher), using image
shift is recommended. Image shift provides a maximum motion size of ±50 μm, which makes
it a suitable tool for performing fine adjustments for conducting a high-magnification
observation at x5,000 or higher.
1. Moving the FOV by Operating the XY Motion Knobs on the Manual Stage
Turning the X knob (on the left side when viewed from the front) on the manual stage to the
right (clockwise) moves the observation image to the right; turning it to the left
(counterclockwise) moves the observation image to the left.
Figure 4.2.10-1 Selecting an Observation FOV (X-Knob)
X knob

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