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Inficon Cygnus 2 User Manual

Inficon Cygnus 2
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5 - 11
Cygnus 2 Operating Manual
RISE TIME 1 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period over which the power is ramped from
0 or from Precon Soak Power if programmed to Soak Power 1. The default
values is 00:00.
SOAK POWER 1 . . . . . . . . . . . . . . . 0.00 to 99.99%
This parameter is usually set to the power level at which the material just begins
to melt. Cygnus 2 ramps the power level from zero or Precon Soak level if
programmed to Soak Power 1 linearly over the time period Rise Time 1. The
default value is 0. If set to a value greater than Maximum Power, Maximum
Power has priority. See section 3.5.5.1for information on determining
appropriate Soak Power using the optional Handheld Controller (IPN
755-262-G1).
SOAK TIME 1 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period for which Cygnus 2 holds at
Soak Power 1. The default value is 00:00.
RISE TIME 2 . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter sets the time period in which Cygnus 2 linearly ramps the power
level from Soak Power 1 to Soak Power 2. The default value is 00:00.
SOAK POWER 2 . . . . . . . . . . . . . . . 0.00 to 99.99%
This parameter sets the power level at which the rate from the Material very
nearly matches the desired deposition Rate. Cygnus 2 can ramp the power
level if programmed from zero, from idle power, from Soak Power 1 linearly to
the Soak Power 2 level over the time period RISE TIME 2. The default value is
0%. If set to a value greater than Maximum Power, Maximum Power has
priority.
SOAK TIME 2 . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter sets the time period for which Cygnus 2 holds the power level
at Soak Power 2. The default value is 00:00.
AUTO SOAK 2. . . . . . . . . . . . . . . . . Yes (1), No (0)
The Auto Soak 2 option, when enabled by selecting Yes (1), calculates an
average power setting during the DEPOSIT state. This average power replaces
the value programmed in Soak Power 2 so the next time this Material is
executed, the Soak Power 2 level is the Auto Soak 2 value. In this manner the
Soak Power 2 value closely matches the power level required to achieve the
desired deposition rate. The power is the average over the interval defined
under the Time Power Averaging Time parameter, see section 5.1.7. The
default value is No (0).

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Inficon Cygnus 2 Specifications

General IconGeneral
BrandInficon
ModelCygnus 2
CategoryController
LanguageEnglish

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