Inficon Cygnus 2 User Manual

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Cygnus 2 Operating Manual
5.1.4 Material Sensor Parameters Page
Figure 5-6 Material sensor page
MATERIAL NUMBER . . . . . . . . . . . 1 to 6
Change the number to edit or create a different Material.
MASTER TOOLING. . . . . . . . . . . . . 1.0 to 999.9%
Tooling is a correction factor used for correlating the rate and thickness
accumulation on the crystal with the thickness accumulation on the substrate.
This thickness difference is due to the geometric distribution of material flux
from the source.
The MASTER TOOLING factor is calculated using equation [1].
[1]
where TF
i
= Initial Tooling Factor, T
m
= Actual Thickness at the
Substrate, and T
x
= Thickness on the Crystal.
The default value is 100%.
If the TOOLING is changed, the new TOOLING value is used for subsequent
calculation of the individual as well as aggregate rate and thickness. Also, the
thickness accumulated thus far will be re-scaled based on the change to the
TOOLING.
TOOLING TF
i
T
m
T
x
=

Inficon Cygnus 2 Specifications

General

Brand	Inficon
Model	Cygnus 2
Category	Controller
Language	English