Inficon Cygnus 2 User Manual

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Cygnus 2 Operating Manual
3.5 Special Features
Cygnus 2 has several special features to enhance the performance of the
instrument.
3.5.1 Crystal Switching
Cygnus 2 offers a choice of Single, XtalTwo (CrystalTwo
®
), XtalSix (CrystalSix
®
),
Xtal12 (Crystal12
®
), or Generic sensors. The CrystalTwo, CrystalSix, Crystal12,
and Generic sensors provide one or more backup crystals in case a crystal fails
during deposition. Sensor types are specified on the Sensors screen.
The XtalTwo option requires the 779-220-G1 or 779-220-G2 XTAL2 Switch. The
XTAL2 Switch is connected to any Sensor input through an XIU package.
All multi-position and shuttered sensors require the Pneumatic Actuator Control
Valve, part number 750-420-G1, and a feedthrough with an air tube.
A crystal switch will automatically occur when:
 Cygnus 2 is configured for a XtalTwo (CrystalTwo) sensor type, a Material is
STARTed or running and there is another good crystal available when the
active crystal fails.
 Cygnus 2 is configured for a XtalSix, Xtal12 or Generic, a Material is STARTed
or running, and there is at least one good crystal left in the carousel when the
active crystal fails.
 Using a XtalSix or Xtal12 and pressing START if the current position is not
within the First/Last Xtal position range listed on the Sensor page of the
Material screen.
 S and Q levels are exceeded while in deposit.
20. IDLE Source resting at Idle Power; will accept a
START command.
Inactive Inactive 19
21. STOP The respective Material’s Source output is
set to zero power. The Material’s display is
frozen at the last thickness value.
Inactive Inactive 20
NOTE: In STOP Cygnus 2 will accept a START provided a valid crystal is available for the Material being started.
Table 3-2 State descriptions (continued)
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter
Sensor
Shutter

Inficon Cygnus 2 Specifications

General

Brand	Inficon
Model	Cygnus 2
Category	Controller
Language	English