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Inficon Cygnus 2 User Manual

Inficon Cygnus 2
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3 - 23
Cygnus 2 Operating Manual
3.4 State Descriptions
Table 3-2 State descriptions
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter
Sensor
Shutter
1. READY Cygnus 2 will accept a START command. Inactive Inactive 0
2. CRUCIBLE SWITCH
(Crucible Sw)
During this state, the crucible turret is being
moved from its current position to the one
called out for the given Material. If the idle
power of the Source in use is not zero the
power is set to zero before the crucible
position changes. Cygnus 2 advances to
next state when turret input goes low for the
programmed position or turret delay has
elapsed (depending on parameter settings).
Inactive Inactive 1
3. PRECON RISE Source power rises to Precondition power
level over the precondition rise time.
[PreCon Rise Time]
Inactive Inactive 2
4. PRECON SOAK Source is maintained at precondition power
level for the precondition soak time. [PreCon
Soak Time, PreCon Soak Power]
Inactive Inactive 3
5. RISE 1 Source is rising to Soak Power 1 level. [Rise
Time 1]
Inactive Inactive 4
6. SOAK 1 Source is being maintained at Soak Power 1
level. [Soak Time 1, Soak Power 1]
Inactive Inactive 5
7. RISE 2 Source is rising to Soak Power 2 level. [Rise
Time 2]
Inactive Inactive 6
8. SOAK 2 Source is being maintained at Soak Power 2
level. [Soak Time 2, Soak Power 2]
Inactive Inactive 7
9. SHUTTER DLY Rate is being controlled. Advances to
Deposit State once the Source is in Rate
Control within Shutter Delay Accuracy for 5
seconds.
Inactive Active 8
10. DEPOSIT Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time]
Active Active 9
11. RATE RAMP 1 Rate control, desired rate changing. [New
Rate 1, Start Ramp 1, Ramp Time 1]
Active Active 10
12. RATE RAMP 2 Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2]
Active Active 11

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Inficon Cygnus 2 Specifications

General IconGeneral
BrandInficon
ModelCygnus 2
CategoryController
LanguageEnglish

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