EasyManuals Logo

Inficon Cygnus 2 User Manual

Inficon Cygnus 2
266 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Page #231 background imageLoading...
Page #231 background image
13 - 24
Cygnus 2 Operating Manual
13.7.5 Sputtering Sensor
Observe the general precautions for replacing crystals and follow the instructions
below to replace the crystal in a sputtering sensor.
1 Grip the body assembly with your fingers and pull it straight out to separate it
from the water-cooled front cover. (You may have to disconnect the sensor
cable in order to separate the parts.) See Figure 13-5.
2 Pull the crystal holder straight out from the front of the body assembly.
3 Remove the ceramic retainer from the crystal holder by pulling it straight out
with the crystal snatcher (see section 13.7.6 on page 13-25).
4 Turn the crystal holder over so that the crystal drops out.
5 Install a new crystal into the crystal holder with the patterned electrode facing
the back and contacting the leaf springs on the ceramic retainer.
6 Put the ceramic retainer back into the crystal holder and put the holder into the
body assembly of the sensor.
7 Align the position of the body assembly so that the connector matches with the
notch on the front cover of the sensor. Snap the two parts together. Reconnect
the sensor cable if it has been disconnected.
Figure 13-5 Sputtering crystal sensor
Body Assembly
IPN 750-619-G1
In-Vacuum Cable Assembly
(29 in.) IPN 007-044
Ceramic Retainer
IPN 007-023
Crystal
IPN 008-009-G10
(Silver)
Crystal Holder
IPN 007-049
Sensor
Front Cover
IPN 007-047

Table of Contents

Questions and Answers:

Question and Answer IconNeed help?

Do you have a question about the Inficon Cygnus 2 and is the answer not in the manual?

Inficon Cygnus 2 Specifications

General IconGeneral
BrandInficon
ModelCygnus 2
CategoryController
LanguageEnglish

Related product manuals