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Inficon Cygnus 2 User Manual

Inficon Cygnus 2
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9 - 28
Cygnus 2 Operating Manual
9.4.23 Update User Message
Command = UV < User Message Number> < User Message Name>
User Message Number = <Byte> 1 - 10
User Message # Name = <String> Up to 19 characters, null terminated
Response = None (Just header and trailer)
NOTE: A user message that is currently displayed will not be changed on the
screen until the message area is refreshed.
9.4.24 Query Logic Statement
Command = QL <Statement Number>
Statement Number = <Byte> 1 - 100
Response = <Length of logic elements> <Set of elements>
NOTE: This length is NOT the same as the length of the packet. It tells how many
bytes follow in the "event/action" <set of elements>.
Response can be made up of the following elements. All elements except Numeric
2 are one byte. Numeric 2 is a 4-byte integer.
AND connector. . . . . . . . . . . . . . . . . 0x26
Or connector . . . . . . . . . . . . . . . . . . 0x7C
Left parenthesis . . . . . . . . . . . . . . . . 0x28
Right Parenthesis. . . . . . . . . . . . . . . 0x29
On connector . . . . . . . . . . . . . . . . . . 0x40
Event code . . . . . . . . . . . . . . . . . . . . <byte> (See note 1)
Negated Event code. . . . . . . . . . . . . <byte> (See note 1)
Numeric 1 . . . . . . . . . . . . . . . . . . . . <byte> (See note 2)
Numeric 2. . . . . . . . . . . . . . . . . . . . . <integer> (See note 3)
Space . . . . . . . . . . . . . . . . . . . . . . . . 0x20 separates "if" and "then"
Action code . . . . . . . . . . . . . . . . . . . <byte> (See note 1)
Action Numeric. . . . . . . . . . . . . . . . . <byte> (See note 4)
Terminator . . . . . . . . . . . . . . . . . . . . (ETX) 0x03 Indicates end of "then"

Table of Contents

Questions and Answers:

Inficon Cygnus 2 Specifications

General IconGeneral
TechnologyQuartz Crystal Microbalance (QCM)
Number of SensorsUp to 6
Power Requirements100-240 VAC, 50/60 Hz
Communication InterfaceEthernet, RS-232, USB
Power Supply100-240 VAC, 50/60 Hz
Thickness Range0.1 Å to 999, 999 Å
I/O InterfacesEthernet, RS-232, USB
Measurement PrincipleQuartz Crystal Microbalance
Operating Temperature0°C to 50°C
Storage Temperature-20°C to 70°C
Deposition Rate Range0.001 to 999.9 Å/s (0.0001 to 99.99 nm/s)

Summary

Declaration Of Conformity

Warranty

Chapter 1 Introduction and Specifications

1.1 Introduction

Introduces the Cygnus 2 as a closed-loop process controller for physical vapor deposition.

1.2 Cygnus 2 Safety

Covers essential safety precautions, including definitions of notes, cautions, and warnings.

1.3 How To Contact INFICON

Provides contact information for technical support, sales, and service.

1.4 Cygnus 2 Specifications

Lists detailed technical specifications for the Cygnus 2 controller, including measurement and interface details.

Chapter 2 Installation and Interfaces

2.1 Location Guidelines

Provides recommendations for selecting an appropriate installation location for the Cygnus 2.

2.2 Avoiding Electrical Interference

Explains methods to prevent electrical noise and ensure proper grounding for reliable operation.

2.3 Connecting the Controller

Details the procedures for connecting the Cygnus 2 controller to power and external equipment.

Chapter 3 Operation

3.1 Front Panel Controls

Describes the function of each control and indicator on the front panel of the Cygnus 2.

3.2 Rear Panel Interfaces

Details the connectors and interfaces available on the rear panel of the Cygnus 2.

3.3 Displays

Explains the various display screens used for monitoring and programming the Cygnus 2.

Chapter 4 Sensor and Source Set-Up

4.1 Sensor Set-Up Introduction

Introduces the process of sensor setup and navigation within the Cygnus 2 interface.

4.2 Source Set-Up Introduction

Introduces the process of source setup and navigation within the Cygnus 2 interface.

4.3 DAC Output Selection Rules

Outlines the rules and considerations for configuring DAC outputs for different functions.

Chapter 5 Material Set-Up

5.1 Introduction

Introduces the material definition capabilities and setup process of the Cygnus 2.

5.2 Special Material Parameter Features

Describes special features related to material parameters, such as Skip Deposit and RateWatcher.

Chapter 6 General Parameters

6.1 General Set-Up Overview

Provides an overview of the general setup parameters for the Cygnus 2 system.

6.2 General Process Page

Explains the parameters on the General Process page for system-level settings.

6.3 DACs Page Parameters

Details the configuration of DAC outputs, including polarity and full scale voltage.

Chapter 7 Digital I/O

7.1 Digital I/O Screen

Describes the main Digital I/O screen for viewing I/O configurations.

7.2 All Input Page

Shows all input configurations, highlighting active inputs.

7.3 All Output Page

Shows all output configurations, highlighting active outputs.

Chapter 8 Logic Statement Set-Up

8.1 Logic Statement Overview

Provides an overview of the Cygnus 2's programmable logic capabilities.

8.2 Editing the Logic Statements

Explains how to edit and create logic statements for controlling process sequences.

8.3 IF Event Definitions

Details the various events that can be used as conditions in logic statements.

Chapter 9 Remote Communications

9.1 Remote Communication Configuration Overview

Provides an overview of remote communication capabilities and setup.

9.2 Physical Connections

Describes the physical connections for RS-232 and TCP/IP communication ports.

9.3 Message Format

Explains the structure and format of commands and responses for remote communication.

Chapter 10 Maintenance and Calibration Procedures

10.1 Importance of Density, Tooling and Z-Ratio

Explains the significance of density, tooling, and Z-ratio in deposition monitoring and calibration.

10.2 Determining Density

Details the procedure for determining the density value of deposited materials.

10.3 Determining Tooling

Provides steps for calculating the tooling factor to correlate rate and thickness measurements.

Chapter 11 Counters and Timers

11.1 Introduction

Introduces the counters and timers available on the Cygnus 2 for logic customization.

Chapter 12 USB Storage

12.1 File Handling (USB)

Covers file handling via the USB port for configuration, screen captures, and data logs.

12.2 Directory Structure

Details the directory structure used for organizing files on the USB storage device.

12.3 Configuration Files

Explains how to save and retrieve configuration files from the USB port.

Chapter 13 Troubleshooting, Status and Error Messages

13.1 Status Messages

Lists and explains various status messages with their designators and meanings.

13.2 User Messages

Describes user-defined messages that can be displayed and cleared via logic actions.

13.3 STOP messages

Lists causes of STOP messages and their corresponding designators.

13.4 Transient Messages

Explains transient messages that appear on the screen as conditions occur.

13.5 Input Error Messages

Details input error messages that appear when invalid parameters are entered.

13.6 Troubleshooting Guide

Offers a guide to diagnose and resolve common Cygnus 2 operational issues.

13.6.2 Troubleshooting Transducers/Sensors

Provides troubleshooting steps for common problems with transducers and sensors.

13.6.3 Troubleshooting Computer Communications

Guides troubleshooting for communication issues between the host computer and Cygnus 2.

13.7 Replacing the Crystal

Describes the procedures for replacing the crystal in various sensor types.

13.7.3 Shuttered and Dual Sensors

Explains crystal replacement for shuttered and dual sensor types.

13.7.4 Bakeable Sensor

Details crystal replacement for the bakeable sensor type.

13.7.5 Sputtering Sensor

Describes crystal replacement for the sputtering sensor type.

13.7.6 Crystal Snatcher

Explains the use of the crystal snatcher tool.

13.8 Crystal Sensor Emulator

Describes the Crystal Sensor Emulator tool for diagnosing measurement system issues.

13.8.1 Diagnostic Procedures

Outlines diagnostic procedures using the Crystal Sensor Emulator.

13.8.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure

Details diagnostic steps for sensor heads and monitor crystals.

13.8.1.4 System Diagnostics Pass But Crystal Fail Message Remains

Addresses scenarios where Crystal Fail messages persist despite proper system operation.

13.8.2 % XTAL Life

Explains the % XTAL Life display and its relation to the Crystal Sensor Emulator.

13.8.3 Sensor Cover Connection

Discusses the compatibility of the Crystal Sensor Emulator's cover connector with various sensor heads.

13.8.4 Specifications

Lists the technical specifications of the Crystal Sensor Emulator.

Chapter 14 Measurement and Control Theory

14.1 Basics

Introduces QCM principles, mass sensitivity, and frequency changes.

14.1.3 Z-match Technique

Explains the Z-match equation for calculating acoustic properties and frequency-to-thickness conversion.

14.1.6 Auto-Z Theory

Details the theory behind the Auto-Z feature for automatic Z-Ratio calculation.

14.1.7 Control Loop Theory

Explains control loop principles like PID, tuning, and methods for calculating parameters.

Appendix A Material Table

A.1 Introduction

Introduces the Cygnus 2's material library and its contents.

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