Inficon Cygnus 2 User Manual

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Cygnus 2 Operating Manual
Figure 3-16 Simplified Cygnus 2 state sequence diagram
STOP
STOP
NO
NO
NO
ON
YES
YES
YES
ON / STBY
STBY POWER
FAI L
STANDBY
RESET
YES
YES
NO NO
NO
SAVE
CURRENT
PROCESS
DATA
TURRET DELAY TIME OUT
CRUCIBLE
IN
POSITION
?
tMEMORY CHECKS
tREAD
CONFIGU RATION
SWITCHES
tRESTORE CURRENT
PROCESS VALUES
PRECONDITION RISE
PRECONDITION SOAK
RISE TIME
1
SOURCE
SWITCH
SAME
SOURCE
AND
CRUCIBLE
?
IDLE
POWER
ZERO
?
t LOAD FILM
PARAMETERS
SOAK
TIME
1
SOAK
HOLD
INPUT
?
RISE
TIME
2
SOAK
TIME
2
SOAK
HOLD 2
INPUT
?
SHUTTER
DELAY
?
SHUTTER
DELAY
SHUTTER
DELAY
?
CONTRO L
DELAY
YES
YES
NO
MPWR
START
)
)
)
)
YES
YES
A
A
NO
NO
NO
NO
NO
YES
YES
YES
NO
READY
IDLE
WAS
TIME
POWER
USED
?
IDLE
RAMP
TIME
FEED
TIME
FEED
RAMP
ON FINAL THK
DECISION
DATA
LOG
UPDATE
THICKNESSFINAL
TIME ELAPSED
XTAL FAIL
TIME
ELAPSED
FINAL THK
XTAL FAIL
?
RATE
RAMP
FINAL THICKNESS
RATE RAMP THICKNESS
XTAL FAIL
FINAL THK
THK LIMIT
XTAL FAIL
?
XTAL
SWITCH
SELECTED
?
DEPOSIT
RATEWATCHER
DEPOSIT
RETAIN
THICKNESS
AT
“STOP” VALUE
ZERO
THICKNESS
PROCESS
CONTINUE
?
GOOD
XTAL
?
SWITCH
XTAL
DESIRED
RATE
=
0.0
YES
NO
XTSW
TIME
POWER
SELECTED
?
“TO
FAI LU RE
ACTION
STATE”
TIME
POWER
FINAL
THICK
?
START
YES
)
)

Inficon Cygnus 2 Specifications

General

Brand	Inficon
Model	Cygnus 2
Category	Controller
Language	English