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Cygnus 2 Operating Manual

Figure 3-15 Process state diagram

Normal

Sequence

Alternate

Sequence

Hand denotes key press

Key

See Figure 3-16

Main Page

Table of Contents5
Introduction and Specifications14
Introduction14
Cygnus 2 Safety15
Definition of Notes, Cautions and Warnings15
General Safety Information16
Earth Ground16
Main Power Connection17
How to Contact INFICON18
Cygnus 2 Specifications19
Measurement19
Screens and Hierarchy19
Cygnus 2 Features20
Recipe Storage and Datalogging20
Sensor Parameters20
Source Parameters20
Material Parameters21
General Global Parameters23
Display24
DAC Outputs25
Logic Processing26
Relays / Inputs26
Remote Communications27
Accessories27
Power27
Operating Environment28
Storage Temperature28
Warm up Period28
Size28
Installation Clearance Requirements28
Connector Clearances28
Cooling Clearances28
Weight29
Cleaning29
Unpacking and Inspection29
Parts and Options Overview29
Base Configurations29
Pre-Installed Options or Spares30
Optional Accessories30
Oscillator Packages30
Sensors30
Replacement Cables31
Initial Power-On Verification32
Installation and Interfaces34
Location Guidelines34
Sensor Types34
Sensor Installation34
Cygnus 2 Installation37
Avoiding Electrical Interference37
Verifying/Establishing Earth Ground37
Connections to Earth Ground38
Minimizing Noise Pickup from External Cabling39
Connecting the Controller40
Routing XIU Cables40
Interface Cable Fabrication and Pin-Out40
Source Control Connection41
Crucible Indexer Connections41
DAC Option Kit41
I/O Expansion Options42
RS-232C Communications44
Isolated +24 V (DC) Supply45
Operation46
Front Panel Controls46
Rear Panel Interfaces48
Displays50
Main Menu Display50
Operate51
Sensor Information53
Sensor Information Rate/Xtal Display Description53
Crystal Life and Starting Frequency55
Function Key Selection Choices55
Sensor Information Type/Freq Display Description56
Test Xiu57
Sensor Screen58
Source59
Material60
Overview Page60
Source Page60
Sensor Page61
Pre/Post Page61
Deposit Page61
Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays62
General62
Process Page62
Dacs Page62
Comm Page63
Message Page63
Date/Time Page63
Test Page63
Lock Page63
Audio/Visual Page63
Digital I/O64
Logic65
Maintenance65
Counter / Timer65
USB Storage65
Programming Guidelines65
State Descriptions68
Special Features70
Crystal Switching70
Xtaltwo (Crystaltwo)71
Xtalsix (Crystalsix)72
Xtal12 (Crystal12)72
Generic Sensor Crystal Switching73
Source/Crucible Selection73
Example: Programming Turret Source Crucible Selection73
Auto-Z74
Rate Watcher76
Handheld Controller76
Determining Soak Power with the Handheld Controller77
Test Mode77
Standard or Time Compressed77
Advanced Test77
USB Storage Device78
Lock and Access Codes79
Datalog80
Datalog Contents81
Page Format ASCII Example83
Comma Format ASCII Example to USB Storage Device84
DAC Monitoring85
Trend Analysis85
Cygnus 2 Parameters Associated with the Trend Analysis Feature85
Sensor and Source Set-Up86
Sensor Set-Up Introduction86
Sensor Display Navigation86
Sensor Parameters87
Source Set-Up Introduction89
Source Navigation89
Source Parameters90
DAC Output Selection Rules92
Material Set-Up93
Introduction93
Material Overview Page93
Material Definition94
Material Source95
Material Sensor Parameters Page99
Pre/Post Screen Deposit102
Post Deposit Parameters105
Deposit106
Special Material Parameter Features109
Skip Deposit109
Ratewatcher™ Sample and Hold Feature109
General Parameters111
General Set-Up Overview111
General Process Page111
Dacs112
Comm113
MESSAGE Page Set-Up115
DATE / TIME Set up116
TEST Page Set up117
LOCK Page Code Set-Up118
AUDIO / VISUAL Page Set up119
Digital I/O Screen120
All Input Page120
All Output Page121
I/O Board Page122
Output Type122
Logic Statement Set-Up123
Logic Statement Overview123
Editing the Logic Statements124
Logic Statement Groups125
Logic Statement Editing126
AND/OR and on Logic Connectors128
ON Operator128
IF Event Definitions129
THEN Action Definitions136
Logic Statement Example139
Remote Communications141
Remote Communication Configuration Overview141
Physical Connections141
RS-232C Serial Port141
TCP/IP Ethernet Port142
Network Connection142
How to Set up the Network Protocol on the PC142
Message Format145
Protocol145
Command Packet (Host to Cygnus 2 Message)145
Data Type Codes147
Response Packet (Cygnus 2 to Host Message)148
Timeouts150
Communication Commands150
Query and Update Commands150
Status Commands151
HELLO Command151
Query General Parameter151
Update General Parameter152
Query Material Parameter157
Update Material Parameter157
Query Sensor Parameter162
Update Sensor Parameter162
Query Source Parameter163
Update Source Parameter163
Query Process Material Parameter165
Update Process Material Parameter165
Query Material Name166
Update Material Name166
Query Input Name166
Update Input Name166
Query Output Name166
Update Output Name167
Query Output Type167
Update Output Type167
Query User Message167
Update User Message168
Query Logic Statement168
Update Logic Statement170
Cygnus 2 Event List170
Cygnus 2 Action List174
Status General176
Status Material179
Status Sensor181
Remote General Action183
Remote Material Action186
Cygnus 2 Communications Examples188
General Command Packet Format188
HELLO Command, ASCII Name and Version188
Query Material Parameter, Z-Ratio (2), Material 1189
Query Sensor Parameter, Shutter Output (1), Sensor 1189
Update Sensor Parameter, Sensor Type (2), Sensor 1, Crystaltwo (1)189
Update Source Parameter, Number of Crucibles (3), Source 1, 4 Crucibles189
Query Material Name, Material 1190
Update Material Name, Material 1, "SILVER190
Query Input Name, Input 1190
Update Input Name, Input 1, "P1190
Query Output Name, Output 1190
Update Output Name, Output 1, "SHUTTER190
Query Output Type, Output 1191
Update Output Type, Output 1, Normally Closed (1)191
Query User Message, Message 1191
Update User Message, Message 1, "HELLO191
Query Logic Statement, Statement 1191
Update Logic Statement, Statement 1, "IF External Input 1 then Start 1192
Status Material, Thickness (4), Material 1193
Status Sensor, Crystal Life (0), Sensor 1193
Remote General Action, Stop All193
Remote Material Action, Open Source Shutter (8)193
Example for Interpreting Float Responses194
Maintenance and Calibration Procedures196
Importance of Density, Tooling and Z-Ratio196
Determining Density196
Determining Tooling197
Laboratory Determination of Z-Ratio198
Source Maintenance200
Source Maintenance Parameters201
Crucible Rotation201
Toggle Sensor and Source Shutter201
Start/Stop Manual Power201
System Status202
Counters and Timers203
Introduction203
USB Storage204
File Handling (USB)204
USB Storage Devices204
Directory Structure204
Configuration Files205
Data Logs206
Screen Captures207
Troubleshooting, Status and Error Messages208
Status Messages209
User Messages211
STOP Messages212
Transient Messages213
Input Error Messages217
Troubleshooting Guide218
Troubleshooting Cygnus 2219
Troubleshooting Transducers/Sensors222
Troubleshooting Computer Communications226
Replacing the Crystal227
Front Load227
Cool Drawer228
Bakeable Sensor230
Sputtering Sensor231
Crystal Snatcher232
Crystalsix (Xtalsix)232
Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2233
Diagnostic Procedures234
Measurement System Diagnostic Procedure234
Feedthrough or In-Vacuum Cable235
Diagnostic Procedure235
Sensor Head or Monitor Crystal Diagnostic Procedure236
System Diagnostics Pass but237
Crystal Fail Message Remains237
XTAL Life237
Sensor Cover Connection238
Specifications239
Measurement and Control Theory240
Basics240
Monitor Crystals241
Period Measurement Technique243
Z-Match Technique244
Active Oscillator245
Modelock Oscillator246
Auto-Z Theory248
Control Loop Theory250
Material Table254
Introduction254

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