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Inficon Cygnus 2 User Manual
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Cygnus 2 Operating Manual
248
ZnSe
5.260
0.722
Zinc Selenide
249
ZnT
e
6
.340
0.770
Zinc T
e
lluride
250
Zr
6.490
0.600
Zirconium
251
Zr
B
2
6.080
*1.000
Zircon
ium Boride
252
Zr
C
6.73
0
0
.264
Zirconi
um Carbide
253
ZrN
7.09
0
*
1.000
Zirconium N
itride
254
Zr
O
2
5.600
*1.000
Zircon
ium Oxide
T
able
A-1 Material T
able (continued)
Code
Formula
Density
Z-Ratio
Material Name
261
263
Table of Contents
Table of Contents
5
Introduction and Specifications
14
Introduction
14
Cygnus 2 Safety
15
Definition of Notes, Cautions and Warnings
15
General Safety Information
16
Earth Ground
16
Main Power Connection
17
How to Contact INFICON
18
Cygnus 2 Specifications
19
Measurement
19
Screens and Hierarchy
19
Cygnus 2 Features
20
Recipe Storage and Datalogging
20
Sensor Parameters
20
Source Parameters
20
Material Parameters
21
General Global Parameters
23
Display
24
DAC Outputs
25
Logic Processing
26
Relays / Inputs
26
Remote Communications
27
Accessories
27
Power
27
Operating Environment
28
Storage Temperature
28
Warm up Period
28
Size
28
Installation Clearance Requirements
28
Connector Clearances
28
Cooling Clearances
28
Weight
29
Cleaning
29
Unpacking and Inspection
29
Parts and Options Overview
29
Base Configurations
29
Pre-Installed Options or Spares
30
Optional Accessories
30
Oscillator Packages
30
Sensors
30
Replacement Cables
31
Initial Power-On Verification
32
Installation and Interfaces
34
Location Guidelines
34
Sensor Types
34
Sensor Installation
34
Cygnus 2 Installation
37
Avoiding Electrical Interference
37
Verifying/Establishing Earth Ground
37
Connections to Earth Ground
38
Minimizing Noise Pickup from External Cabling
39
Connecting the Controller
40
Routing XIU Cables
40
Interface Cable Fabrication and Pin-Out
40
Source Control Connection
41
Crucible Indexer Connections
41
DAC Option Kit
41
I/O Expansion Options
42
RS-232C Communications
44
Isolated +24 V (DC) Supply
45
Operation
46
Front Panel Controls
46
Rear Panel Interfaces
48
Displays
50
Main Menu Display
50
Operate
51
Sensor Information
53
Sensor Information Rate/Xtal Display Description
53
Crystal Life and Starting Frequency
55
Function Key Selection Choices
55
Sensor Information Type/Freq Display Description
56
Test Xiu
57
Sensor Screen
58
Source
59
Material
60
Overview Page
60
Source Page
60
Sensor Page
61
Pre/Post Page
61
Deposit Page
61
Lib A-Hf, Lib Hf-Sc, Lib Sc-Z Sub-Displays
62
General
62
Process Page
62
Dacs Page
62
Comm Page
63
Message Page
63
Date/Time Page
63
Test Page
63
Lock Page
63
Audio/Visual Page
63
Digital I/O
64
Logic
65
Maintenance
65
Counter / Timer
65
USB Storage
65
Programming Guidelines
65
State Descriptions
68
Special Features
70
Crystal Switching
70
Xtaltwo (Crystaltwo)
71
Xtalsix (Crystalsix)
72
Xtal12 (Crystal12)
72
Generic Sensor Crystal Switching
73
Source/Crucible Selection
73
Example: Programming Turret Source Crucible Selection
73
Auto-Z
74
Rate Watcher
76
Handheld Controller
76
Determining Soak Power with the Handheld Controller
77
Test Mode
77
Standard or Time Compressed
77
Advanced Test
77
USB Storage Device
78
Lock and Access Codes
79
Datalog
80
Datalog Contents
81
Page Format ASCII Example
83
Comma Format ASCII Example to USB Storage Device
84
DAC Monitoring
85
Trend Analysis
85
Cygnus 2 Parameters Associated with the Trend Analysis Feature
85
Sensor and Source Set-Up
86
Sensor Set-Up Introduction
86
Sensor Display Navigation
86
Sensor Parameters
87
Source Set-Up Introduction
89
Source Navigation
89
Source Parameters
90
DAC Output Selection Rules
92
Material Set-Up
93
Introduction
93
Material Overview Page
93
Material Definition
94
Material Source
95
Material Sensor Parameters Page
99
Pre/Post Screen Deposit
102
Post Deposit Parameters
105
Deposit
106
Special Material Parameter Features
109
Skip Deposit
109
Ratewatcherâ„¢ Sample and Hold Feature
109
General Parameters
111
General Set-Up Overview
111
General Process Page
111
Dacs
112
Comm
113
MESSAGE Page Set-Up
115
DATE / TIME Set up
116
TEST Page Set up
117
LOCK Page Code Set-Up
118
AUDIO / VISUAL Page Set up
119
Digital I/O Screen
120
All Input Page
120
All Output Page
121
I/O Board Page
122
Output Type
122
Logic Statement Set-Up
123
Logic Statement Overview
123
Editing the Logic Statements
124
Logic Statement Groups
125
Logic Statement Editing
126
AND/OR and on Logic Connectors
128
ON Operator
128
IF Event Definitions
129
THEN Action Definitions
136
Logic Statement Example
139
Remote Communications
141
Remote Communication Configuration Overview
141
Physical Connections
141
RS-232C Serial Port
141
TCP/IP Ethernet Port
142
Network Connection
142
How to Set up the Network Protocol on the PC
142
Message Format
145
Protocol
145
Command Packet (Host to Cygnus 2 Message)
145
Data Type Codes
147
Response Packet (Cygnus 2 to Host Message)
148
Timeouts
150
Communication Commands
150
Query and Update Commands
150
Status Commands
151
HELLO Command
151
Query General Parameter
151
Update General Parameter
152
Query Material Parameter
157
Update Material Parameter
157
Query Sensor Parameter
162
Update Sensor Parameter
162
Query Source Parameter
163
Update Source Parameter
163
Query Process Material Parameter
165
Update Process Material Parameter
165
Query Material Name
166
Update Material Name
166
Query Input Name
166
Update Input Name
166
Query Output Name
166
Update Output Name
167
Query Output Type
167
Update Output Type
167
Query User Message
167
Update User Message
168
Query Logic Statement
168
Update Logic Statement
170
Cygnus 2 Event List
170
Cygnus 2 Action List
174
Status General
176
Status Material
179
Status Sensor
181
Remote General Action
183
Remote Material Action
186
Cygnus 2 Communications Examples
188
General Command Packet Format
188
HELLO Command, ASCII Name and Version
188
Query Material Parameter, Z-Ratio (2), Material 1
189
Query Sensor Parameter, Shutter Output (1), Sensor 1
189
Update Sensor Parameter, Sensor Type (2), Sensor 1, Crystaltwo (1)
189
Update Source Parameter, Number of Crucibles (3), Source 1, 4 Crucibles
189
Query Material Name, Material 1
190
Update Material Name, Material 1, "SILVER
190
Query Input Name, Input 1
190
Update Input Name, Input 1, "P1
190
Query Output Name, Output 1
190
Update Output Name, Output 1, "SHUTTER
190
Query Output Type, Output 1
191
Update Output Type, Output 1, Normally Closed (1)
191
Query User Message, Message 1
191
Update User Message, Message 1, "HELLO
191
Query Logic Statement, Statement 1
191
Update Logic Statement, Statement 1, "IF External Input 1 then Start 1
192
Status Material, Thickness (4), Material 1
193
Status Sensor, Crystal Life (0), Sensor 1
193
Remote General Action, Stop All
193
Remote Material Action, Open Source Shutter (8)
193
Example for Interpreting Float Responses
194
Maintenance and Calibration Procedures
196
Importance of Density, Tooling and Z-Ratio
196
Determining Density
196
Determining Tooling
197
Laboratory Determination of Z-Ratio
198
Source Maintenance
200
Source Maintenance Parameters
201
Crucible Rotation
201
Toggle Sensor and Source Shutter
201
Start/Stop Manual Power
201
System Status
202
Counters and Timers
203
Introduction
203
USB Storage
204
File Handling (USB)
204
USB Storage Devices
204
Directory Structure
204
Configuration Files
205
Data Logs
206
Screen Captures
207
Troubleshooting, Status and Error Messages
208
Status Messages
209
User Messages
211
STOP Messages
212
Transient Messages
213
Input Error Messages
217
Troubleshooting Guide
218
Troubleshooting Cygnus 2
219
Troubleshooting Transducers/Sensors
222
Troubleshooting Computer Communications
226
Replacing the Crystal
227
Front Load
227
Cool Drawer
228
Bakeable Sensor
230
Sputtering Sensor
231
Crystal Snatcher
232
Crystalsix (Xtalsix)
232
Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
233
Diagnostic Procedures
234
Measurement System Diagnostic Procedure
234
Feedthrough or In-Vacuum Cable
235
Diagnostic Procedure
235
Sensor Head or Monitor Crystal Diagnostic Procedure
236
System Diagnostics Pass but
237
Crystal Fail Message Remains
237
XTAL Life
237
Sensor Cover Connection
238
Specifications
239
Measurement and Control Theory
240
Basics
240
Monitor Crystals
241
Period Measurement Technique
243
Z-Match Technique
244
Active Oscillator
245
Modelock Oscillator
246
Auto-Z Theory
248
Control Loop Theory
250
Material Table
254
Introduction
254
4
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Inficon Cygnus 2 Specifications
General
Brand
Inficon
Model
Cygnus 2
Category
Controller
Language
English
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