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Inficon Transpector MPH - Page 159

Inficon Transpector MPH
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Index - 3
Transpector MPH Operating Manual
none 7-4
spinning rotor gauge 4-11
supply voltage 1-7
surface film 3-13
T
temperature
bakeout 11-3
coefficient 11-2
error 7-3
max operating 11-3
operating 11-3
operating range 1-8
total pressure 9-6
total pressure plate 9-7
transition flow 9-7
transmission factor 4-12, 4-13, 9-7
tuned 4-16
tungsten hexafluoride 3-13
U
ultrahigh vacuum 4-14
user configured switches 11-4
V
vacuum region 4-14
vacuum system 4-14
ventilation requirements 1-7
viscous flow 9-7
W
weight 1-6
Z
zero blast 9-7

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