Keithley 6430 User Manual

A-4 Specifications
Resistance Measurement Accuracy (4-wire sense with remote preamp)
Source I Mode, Auto Ohms
Max. Default Normal Accuracy (23°C ± 5°C) Enhanced Accuracy (23°C ± 5°C)
7
Range Resolution Test Current 1 Year, ±(%rdg + ohms) 1 Year, ±(%rdg + ohms)
<2.00000 Ω
6
1 µΩ — Source I ACC + Measure V ACC Measure I ACC + Measure V ACC
20.0000 Ω 100 µΩ 100 mA 0.098% + 0.003 Ω 0.068% + 0.001 Ω
200.000 Ω 1 mΩ 10 mA 0.077% + 0.03 Ω 0.048% + 0.01 Ω
2.00000 kΩ 10 mΩ 1 mA 0.066% + 0.3 Ω 0.040% + 0.1 Ω
20.0000 kΩ 100 mΩ 100 µA 0.063% + 3 Ω 0.038% + 1 Ω
200.000 kΩ 1 Ω 10 µA 0.082% + 30 Ω 0.064% + 10 Ω
2.00000 MΩ 10 Ω 1 µA 0.082% + 300 Ω 0.064% + 100 Ω
20.0000 MΩ 100 Ω 1 µA 0.085% + 1 kΩ 0.067% + 500 Ω
200.000 MΩ 1 kΩ 100 nA 0.085% + 10 kΩ 0.068% + 5 kΩ
2.00000 GΩ 10 kΩ 10 nA 0.085% + 100 kΩ 0.070% + 50 kΩ
20.0000 GΩ 100 kΩ 1 nA 0.085% + 1 MΩ 0.070% + 500 kΩ
200.000 GΩ 1 MΩ 100 pA 0.205% + 10 MΩ 0.185% + 5 MΩ
2.00000 TΩ 10 MΩ 10 pA 0.822% + 100 MΩ 0.619% + 50 MΩ
20.0000 TΩ 100 MΩ 1 pA 2.06% + 1 GΩ 1.54% + 500 MΩ
>20.0000 TΩ
6
— — Source I ACC + Measure V ACC Measure I ACC + Measure V ACC
Resistance Measurement Accuracy (4-wire sense without remote preamp)
Source I Mode, Auto Ohms
Max. Default Normal Accuracy (23°C ± 5°C) Enhanced Accuracy (23°C ± 5°C)
7
Range Resolution Test Current 1 Year, ±(%rdg + ohms) 1 Year, ±(%rdg + ohms)
<2.00000 Ω
6
1 µΩ — Source IACC + Measure VACC Measure IACC + Measure VACC
20.0000 Ω 100 µΩ 100 mA 0.098% + 0.003 Ω 0.068% + 0.001 Ω
200.000 Ω 1 mΩ 10 mA 0.077% + 0.03 Ω 0.048% + 0.01 Ω
2.00000 kΩ 10 mΩ 1 mA 0.066% + 0.3 Ω 0.040% + 0.1 Ω
20.0000 kΩ 100 mΩ 100 µA 0.063% + 3 Ω 0.038% + 1 Ω
200.000 kΩ 1 Ω 10 µA 0.082% + 30 Ω 0.040% + 10 Ω
2.00000 MΩ 10 Ω 1 µA 0.082% + 300 Ω 0.042% + 100 Ω
20.0000 MΩ 100 Ω 1 µA 0.085% + 1 kΩ 0.045% + 500 Ω
200.000 MΩ 1 kΩ 100 nA 0.085% + 10 kΩ 0.349% + 5 kΩ
TEMPERATURE COEFFICIENT (0°–18°C & 28°–40°C): ±(0.15 × accuracy specification)/°C.
SOURCE I MODE, MANUAL OHMS: Total uncertainty = I source accuracy + V measure accuracy (4-wire sense).
SOURCE V MODE: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense).
6-WIRE OHMS MODE: Available using active ohms guard and guard sense (mainframe rear panel ONLY). Max. Guard Output Current: 50 mA.
Accuracy is load dependent. Refer to manual for calculation formula.
MAINFRAME GUARD OUTPUT RESISTANCE: 0.1Ω in ohms mode.
1
Speed = 10 PLC, Autofilter ON, properly zeroed and settled.
2
Source I mode, I = 0.
3
Voltage measurement accuracy is not affected by the remote preamp.
4
Current measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA ranges are available only when using a
preamp.
5
4-wire mode.
6
Manual ohms mode only.
7
Source readback enabled, offset compensation ON. Source delay must be programmed such that the source is fully settled for each reading.

Keithley 6430 Specifications

General

Type	Sub-Femtoamp Remote SourceMeter
Compliance Voltage	200 V
Maximum Output Voltage	200 V
Maximum Output Current	100 mA
Compliance Limit	Programmable
Interface	GPIB, RS-232
Input Impedance	>10^14 Ω