Keysight E4981A - Page 180

180 Keysight E4981A 120 Hz/1 kHz/1 MHz Capacitance Meter
Specifications and Supplemental Information
Basic Specifications
10-
Table 10-12 Measurement accuracy of Cp, Cs (measurement frequency: 1 MHz, 1 MHz ± 1%,
1 MHz ± 2%)
Cp, Cs [%]
MEAS
TIME (N)
1 2 4 6 8
1 pF
0.055 + 0.070 ×
K
0.055 + 0.047 ×
K
0.055 + 0.036 ×
K
0.055 + 0.033 ×
K
0.055 + 0.030 ×
K
2.2 pF
0.055 + 0.045 ×
K
0.055 + 0.032 ×
K
0.055 + 0.025 ×
K
0.055 + 0.022 ×
K
0.055 + 0.020 ×
K
4.7 pF
0.055 + 0.030 ×
K
0.055 + 0.022 ×
K
0.055 + 0.018 ×
K
0.055 + 0.016 ×
K
0.055 + 0.015 ×
K
10 pF
22 pF
47 pF
100 pF
220 pF
470 pF
1 nF