MKS GE50A - Page 92

Electrical Specifications for GE50A, GM50A and
GV50A
Appendix A: Product Specifications
82
reading from a MFC controller.
Valve Drive Current - Host controller will use this message to get the valve
drive current.
Calibration Instance (Process Gas) Selection - Host controller will use this
message to select which calibration instance is to be used for flow metering.
Query for Calibration Instance (Process Gas) Selected - Host controller will
use this message to query the selected calibration instance, which is currently
being used for flow metering.
Requested Zero Enable - Host controller will use this message to enable
requested function.
Query for Requested Zero Status – Host controller will use this message to
query if the requested zero function has been completed.
Query for Zero Offset - Host controller will use this message to query the
present sensor zero offset.
Set Ramp Time – Used to set the tamp time in ms. The set point will ramp in
from the present to the new setpoint in this period of time..
Query All - This is used to obtain 3 measurements, Flow, valve and
temperature in 1 command.
Set Actuator Mode - This is used to set valve to open, closed or normal
control
Data Rate Switch 3 positions: 9.6, 19.2, 38.4 KBaud
(programmable over the network)
MAC ID Switches 2 switches, 10 positions each; 15 available MACIDs (33-99)
Input Power 11 to 25 VDC per DeviceNet specifications ( @ <3.5 watts)
Network Size Up to 256 nodes (15 available MFC MACIDs)
Network Topology Master/slave
Visual Communication Indicators LED Comm status (green/red)
LED Error status (green/red)
Specifications are subject to change without notice.