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MKS GE50A - Page 97

MKS GE50A
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Appendix B : Model Code Explanation for GE50A &
GV50A
Model Code Description – Elastomer Sealed Products
87
Silicon Tetrachloride 108 SiCl4
Silicon Tetrafluoride 088 SiF4
Sulfur Dioxide 032 SO2
Sulfur Hexafluoride 110 SF6
Sulfur Tetrafluoride 086 SF4
Sulfuryl Fluoride 087 SO2F2
Tetrafluoroethane (R-134a) 156 C2H2F4
Titanium Tetrachloride 114 TiCl4
Toluene 181 C7H8
Trans-Butene 098 C4H8
Trichloroethane 112 C2H3Cl3
Trichlorofluoromethane (R-11) 091 CCl3F
Trichlorosilane 147 SiHCl3
Trichlorotrifluoroethane (R-113) 126 C2Cl3F3
Trifluoromethane (Fluoroform R-23) 049 CHF3
Trimethoxyborine 131 C3H9BO3
Trimethylamine 109 C3H9N
Tungsten Hexafluoride 121 WF6
Uranium Hexafluoride 123 UF6
Vinyl Bromide 056 C2H3Br
Vinyl Chloride 055 C2H3Cl
Xenon 006 Xe

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