Model Code Description – Elastomer Sealed Products Appendix B : Model Code Explanation for GE50A & GV50A
88
Flow Range Full Range (FFF)
The MFC’s mass flow full scale range is indicated by a three digit code.
Mass Flow Rate
G-SERIES
Ordering
Code(FFF)
10 sccm 101
20 sccm 201
50 sccm 501
100 sccm 102
200 sccm 202
500 sccm 502
1000 sccm 103
2000 sccm 203
5000 sccm 503
10000 sccm 104
20000 sccm 204
30000 sccm 304
50000 sccm 504
FittingType (Y)
The fitting options are designated by a letter code.
Fitting Style
GE50A & GV50A
Swagelok 4 VCR male
R
Swagelok 4 VCO male
G
Swagelok ¼” compression seal
S
Downport C-Seal per SEMI 2787.1
-
Downport W-Seal per SEMI 2787.3F
-
Connector – Control I/O (W)
The MFC’s connector is designated by a single number code.
Connector Type Ordering Code
Profibus
4
Digital RS485
5
DeviceNet
6
9 Pin D(Analog I/O)
A
15 Pin D(Analog I/O)
B
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