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182459R01.Sch
Sheet of
File :
11
Drawn by:
Size : Date :
27-Nov-2001
J.Lauer
A2_l
DrawingNo.: Rev.: AssemblyNo.:
114142
01
182459
Machine: Title: Verteilerpl. mit N2-Purge in MH,CH,LAMA6/BA6
Rev. Änderung Datum Name
Rev.: 00
junction board N2-purge MH,CH,LA
This drawing contains information which is the proprietary of Karl Suss Company.
It is received in confidence an its contends may not be disclosed without the prior
written consent of Karl Suss Company.
+24V
+5V
+24V
+5V
+12V VCU
+5V BA6
GND
GND
-12V VCU
R2
4k7
R1
4k7
TR1
2N2222A
D1
1N4148
REL1
HB2
R4
4k7
R3
4k7
D2
1N4148
REL2
HB2
R9
2k
M1
TESTP
R10
2k
TR2
2N2222A
M3
TESTP
R6
270
R5
270
IC1
CNY17-1
M2
TESTP
R7
1k
R8
1k
IC2
CNY17-1
1
2
3
4
5
6
7
8
9
10
1
2
3
4
5
6
7
8
9
10
P22
P25
GND VCU
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
S8.3
S8.4
S8.5
S8.6
S8.1
S8.2
+24V
+24V
+24V
+24V
+24V
+24V
+24V
+24V
+24V
+24V
+24V
GND
GND
GND
GND
GND
GND
GND
GND
GND
GND
GND
GND
GND
+5V
+5V
+5V
+5V
+5V
+5V
+5V
+5V
F2
T3.15A
F1
T2A
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
1
2
3
4
5
6
1
2
3
1
2
3
4
5
6
7
8
9
10
1
2
3
4
5
1
2
3
4
1
2
3
4
1
2
P12
P13
P14
P15 P16
P17
P18
P19
P20
P23
P24
P26
P27
P28
P29
P30
C1
C2
C3
C4 C5
C6
C7
C8
C9
P21
Verteilerplatine
junction board
Exposure unit Sensor table I BSA signals BSA motors
Sensor table II Pneumatik I TSA microscope Mains switch lampDisplay
TSA microscope sensorsPneumatik II
+24V / +5V
Check value Interlock
Key panel
V1.25
V1.26
( 36001597 )
CV1.3
Output
Backplane
Video
Input
Front panel Focus
DCM control TSAOutputAdjustment stage DCM control
CPU
BSA right DCM control BSA left DCM controlInput
S8.3
S8.4
S8.5
S8.6
S8.1
S8.2
an C2
to C2
von P18
from P18
1
2
3
4
5
6
135
246
+5V VCU
blank
+5V
grab
GND
left
splitfield
right
video select (BSA/TSA)
left focus motor
right focus motor
+12V
-12V
P31
P32
123
8914
1516
123
8914
1516
S1.15
S1.14
S1.13
S1.12
S1.11
S 1.16
Tisch-Sensor Res. 2
Tisch-Sensor Res. 3
Tisch-Sensor Res. 4
+24V
GND
switched GND
M4
TESTP
M6
TESTP
M5
TESTP
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C10
DCM Driver 4 channel
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
P35
Stage - motors
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P34
PC bus control
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P33
mot. chuck transport
+5V
+24V
+24V
1
2
P37
magnification right
+24V
1
2
P36
magnification left
1N4004
1N4004
Brücke für BA6 ABS
jumper for BA6 ABS
1K
R11
1
2
P38
JP 1
JP 2
1
2
3
4
1
2
3
4
JP 3
V1.29
V1.30
Ursprung 103487R06
V1.28a+b
V1.28a+b only N2 purge in chuck
V1.29 only N2 purge in mask
V1.30 only N2 purge in lance
Options:
01 V1.29 auf PIN 8 12.11.01 J.Lauer
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