1 2 3 4
A
B
C
D
4
321
D
C
B
A
Adjustment stage DCM control
BSA right DCM controlBSA left DCM controlInput
Output
Input
Output
DCM control TSA
Exposure unit
Sensor table I
BSA signals BSA motors
Sensor table II
Pneumatik I
TSA microscope sensors
Pneumatik II
Key panel
Backplane
Video
F2
T3.15A
F1
T2A
Gnd+5V +24V
Check valve Interlock
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
P17
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P18
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P24
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C7
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P23
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C3
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
P16
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P14
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P20
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
P19
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
P15
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C4
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C9
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C8
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C2
1
2
3
4
5
6
P28
1
2
3
4
P27
1
2
3
4
5
P30
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C6
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
P12
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C10
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
P21
1
2
3
4
5
6
7
8
9
10
P25
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C5
1
2
3
4
P26
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C7b
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
C7a
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
P41
1
2
3
4
5
6
7
8
9
10
P47
1
2
P36
1
2
P38
1
2
P37
D4 1N4004
D3
1N4004
+24V
A
1
K
2
C
5
E
4
B
6
IC2
CNY17-1
A
1
K
2
C
5
E
4
B
6
IC1
CNY17-1
R6
270
R5
270
+5V
R7
1k
R8
1k
+5V_ext
Gnd_ext
+5V_ext
R1
4k7
R2
4k7
R3
4k7
R4
4k7
+5V
+5V
TR1
2N2222
TR2
2N2222
Gnd
Gnd
1 12
6
3
5
7
10
8
Rel1
REL24V_OMRON
+24V
R11
1k
D1
1N4003
D2
1N4003
1 12
6
3
5
7
10
8
Rel2
REL24V_OMRON
+24V
1
2
3
4
5
6
7
8
9
10
P22
+24V Gnd
R9
2k
R10
2k
N00001
N00002
mag/hi/lo
N00006
N00007
N00008
N00009
N00010
N00011
N00012
N00013
N00014
N00015
N00016
N00017
N00022
N00023
N00024
N00025
N00026
N00027
N00028
N00029
N00032
S8.3_2
N00034
S8.4_2
S8.5_2
N00039
S8.6_2
N00041
N00042
N00043
N00045
N00047
N00049
S9.5/MA8
N00051
N00053
N00054
N00055
N00056
N00057
S8.1_2
N00059
S8.2_2
N00062
N00064
N00065
N00069
N00070
N00075
N00076
N00078
N00083
N00085
N00087
N00088
N00089
N00090
N00091
N00092
N00093
N00094
N00095
N00097
N00098
N00099
N00100
N00101
N00102
N00103
N00104
N00105
N00106
N00107
N00108
N00109
N00110
N00111
N00112
N00113
N00114
N00115
N00116
N00117
N00118
N00119
N00120
N00121
N00122
N00123
N00124
N00125
N00126
N00127
N00128
N00129
N00130
N00131
N00132
N00133
N00134
N00135N00136
N00137
N00138
N00139
N00140
N00141
N00142
N00143
N00144
N00145
N00146
N00147
N00148
N00149
N00150
N00151
N00152
N00153
N00154
N00156
N00157
N00158
N00159
N00160
N00161
N00162
N00163
N00164
N00165
N00166
N00169
N00170
N00171
N00172
N00173
N00174
N00176
N00179
N00180
N00182
N00183
N00184
N00185
N00186
N00187
N00188
N00189
N00190
N00191
bsa/cpu
+12V
-12V
blank/on/off
led
mask/wafer
grab/trigger
N00018
N00017
N00019
N00020
N00021
N00168
N00175
+24V
+24V
+24V
+24V
+24V
+24V
+24V
+24V
1
2
P29
+24V
+24V
+5V
+5V
+5V
+5V
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
Gnd
1
2
3
JP18
1
2
3
JP17
Gnd+24V
ohne VCU > Brücken
1
2
3
P48
+24V Gnd
mit VCU > keine Brücken
N2_V1.28a+b_Purge in Chuck
N2_V1.30_Purge in Lance
Mot.Tisch
Mot.Tisch
Mot.Tisch
VCU/EISS
1
2
3
4
5
P43
+5V
+5V
+24V
Gnd
Gnd
Gnd
Gnd
1
2
3
JP4
Gnd - Gnd_ext
1
2
3
JP5
+24V
1
2
3
4
5
6
7
8
9
10
PMESS
N00013
N00024
Gnd_ext
+5V
Gnd
+24V
N00192
N00193
N00197
N00198
N00199
N00200
N00201
N00203
N00204
N00206
N00207
N00208
N00212
N00213
N00214
1
2
P31
1
2
P32
bsa/cpu
mask/wafer
N00216
N00217
N00218
Gnd_ext
Gnd
Joystick
Tasten
1
2
3
4
5
6
7
8
9
10
C9b
1
2
3
4
5
6
7
8
9
10
C9a
RS232A_2
RS232A_3
RS232B_2
RS232B_3
RS232SEL
C11/c28-c26
C11/c27-c25
1
P24V
1
P5V
1
PGnd
1
PGndext
+24V
+5V
Gnd
Gnd_ext
1
P5Vext
+5V_ext
+5V_ext
Flow Sensor
1
2
3
4
P39
+24V Gnd
LH1500
1
2
JP8
1
2
JP9
1
2
JP10
1
2
JP11
1
2
JP12
1
2
JP13
1
2
JP6
GND GND
GND GND
CPU
Display
1
2
3
4
5
6
7
8
9
10
C1
+5V
Gnd
1
2
3
4
5
6
7
8
9
10
P3
1
2
3
4
5
6
7
8
9
10
P2
1
2
3
4
P13
1
2
3
4
5
6
7
8
9
10
P7
GND
1
2
3
4
5
6
7
8
9
10
P5
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
open
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
open
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
open
A0
1
A1
16
COMB
9
EN
2
V-
3
N01A
4
N02A
5
N03A
6
N04A
7
COMA
8
N01B
13
N02B
12
N03B
11
N04B
10
V+
14
GND
15
IC7
MAX399MJE
16
12
13
9
15
10
17
8
C1+
2
C2+
5
GND
18
C1-
4
VCC
19
C2-
6
V-
7
EN
1
FORCEOFF
20
FORCEON
14
V+
3
INVALID
11
IC6
MAX3223ECPP
GND
+5V
GND
+5V
+5V
+5V
GND
C12
0.1µF
C14
0.1µF
GND
C11
0,1µF
C13
0,1µF
TX
RX
GND
D9
gn
R17
220
GND GND
D10
3,3V
D11
20V
R14
220
1K
R15
220
1K
D6
gelb
D7
gelb
GND GND
1
2
3
4
5
6
7
8
9
10
P6
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
open
16
12
13
9
15
10
17
8
C1+
2
C2+
5
GND
18
C1-
4
VCC
19
C2-
6
V-
7
EN
1
FORCEOFF
20
FORCEON
14
V+
3
INVALID
11
IC8
MAX3223ECPP
GND
+5V
+5V
GND
C16
0.1µF
C18
0.1µF
GND
C15
0,1µF
C17
0,1µF
D8
gn
R16
220
GND
GND
1
2
3
4
5
6
7
8
9
10
P4
DCD
DSR
RxD
RTS
TxD
CTS
DTR
Ring
GND
open
GND
RS232 DAT 2/3 OK
RS232 Display/
DAT 1 OK
Option JST 4pol / Display mit RX/TX
Überbrückung Flow Sensor LH1500
ON/OFF-Lamp
grüne Lampe im On/Off - Schalter der Frontplatte
NFH S10.1
NFH S10.2
EISS 10k
DVCU 2k
EISS Verbindung GND_Int und GND_Ext
EISS Verbindung P21:9 auf :13
EISS Magnification Umschaltung
JP14 wird JP6 !!!!
Focus Front Panel
Ersatzt für 4pol MiniKabeldose
Interface
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
P1
KMS_Ofl.
KMS_Gw1
KMS_Gw2
KMS_Gw3
KMS_Gw4
KMS_Sensor 1
KMS_Sensor 2
KMS_Sensor 3
KMS_Sensor 4
NFH_Res
NFH_Res
NFH_S10.1
NFH_S10.2
NFH_M10.1
24V
5V
GND
PreBLaser_Gate
PreBLaser_Rdy.
PreBLaser_Freq.OK
PreBLaser_Error
spare
spare
spare
spare
1
2
JP19
1
2
JP20
BelLaser_Interlock
Laser Prebond
NFH
GND
+24V
+5V
Kraftm.
Mot.Tisch
Pneumatik III
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
P11
WireWrap
WireWrap
WireWrap
Input
+24V
N2_V32_Chamber Purge Neg. Resist
KMS Sensor
1
2
3
4
5
P8
Gnd
KMS_S1
KMS_S2
KMS_S3
KMS_S4
N2_V1.29_Purge in Mask
V1.21
V1.23
V9.1
V9.2
V9.3
V1.24
V8.1
V8.2
V8.3
V1.22
V1.13
V9.4
V9.5
V1.29
CV9.7
CV9.7
CV1.2
CV1.1
CV1.3
V1.28
V1.30
+24V
+24V
+24V
+24V
Gnd
Gnd
+24V
+24V
+24V
+24V
V1.1
V1.2
V1.3
V1.4
V1.5
V1.6
V1.7
V1.8
V1.9
V1.10
V1.11
V1.12
V1.14
V1.15
V1.16
V1.17
V1.18
V1.19V1.19
V1.20
V1.25
V1.26
RS232-Display
RS232DAT1
RS232DAT2
RS232DAT3
Joystick A Joystick B
S9.5
+5V +24V
24V-OK5V-OK
TSA microscope
+5/24V-IN
This drawing contains information which is the proprietary of Karl Suss Company.
It is received in confidence an its contends may not be disclosed without the prior
written consent of Karl Suss Company.
Error : SMTL_LOG.TIF File Not Found
Sheet of
File :Drawn by:
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DrawingNo.: Rev.: AssemblyNo.:03
Machine: Title:
Rev. Änderung Datum Name
.DOC_FILE_NAME_NO_PATH
111-Dec-2005
lg
A4
173828173829
Verteiler PCB 2003MA6/BA6
1
2
3
4
P51
GND
Magnification BSA
Mag.Switch Frontplatte
BSA-L
BSA-R
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
Embossing
Enc-X GND
Enc-X +5V
Enc-X 47LS14:11 A
Enc-X 47LS14:9 B
S1.20 GND
S1.20 C3:13
S1.20 +24V
GND
Mot X+ C6:1,3,5
Mot X+ C6:1,3,5
Mot X- C6:7,9,11
Mot X- C6:7,9,11
S1.19 C3:11
Mot Y+ C7b:21,23
Mot Y+ C7b:21,23
Mot Y- C7b:15,17
Mot Y- C7b:15,17
GND
S1.21 GND
S1.21 C3:15
S1.21 +24V
Enc-Y GND
Enc-Y +5V
Enc-Y 74LS14:5 B
Enc-Y 74LS14:3 A
34
U?B
SN7414N
56
U?C
SN7414N
98
U?D
SN7414N
1110
U?E
SN7414N
GND
+5V +5V+24V+24V
Embossing Ext.Interface
V1.34 Membran Embossing Chuck
Embossing
Gnd
Gnd
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