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Adixen ASM GRAPH D+ - Page 17

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A
201
ASM 142 D detector operating principle
GB 01476
-
Edition 03
- June
08
Gross
leak
test
mode
1
3
(10 mbar to
2
5x10
-1
mbar
18
inlet pressure)
5
V
T1
VR1 VR2
16
15
1
3
2
V
T2
Normal
test
mode
(lower than
5x10
-1
mbar
inlet
pressure)
18
V
T1
16
V
T3
5
15
3
/4

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