Page 92 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP5 – Align Pod Hold Down Latches
a
CAP5 – Align Pod Hold Down Latches
Pre-Service
NOTE . . .
WAFER SEATER MECHANISM ALIGNMENT MAY BE PERFORMED WITH THE
V
ERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH
ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A
SUITABLE SERVICE LOCATION.
Service
_____1. Use a 3/32 inch hex wrench to remove the two screws securing shroud to the
top of the port plate. Set shroud and screws aside.
_____2. Use a 3/32 inch hex wrench to remove the two flathead screws securing the
Tool-side port plate cover and the two screws securing the user-side port plate
cover. The Pod hold-down latch and the slide assemblies will be visible. Place
the front cover to the side and lay the rear cover onto the port door. Set the
hardware aside
_____3. Connect a PC with null modem cable to the Host port of the VersaPort.
Connect 24vdc power. Use ISIM software to test the operation of the
VersaPort. For information on using the software, see “Appendix A: ISIM” on
page 123.
_____a. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to
select LPO/VersaPort and press Enter.
_____b. From the MAIN menu select F2 (MANUAL).
_____c. From the MANUAL menu select F6 (DC MOTOR).
_____d. From the DC MOTOR menu select Close Latch.
_____4. The Pod hold-down latches are aligned when they both move out and stop
perpendicular (or nearly perpendicular) to the port opening and retract nearly
parallel to the port opening when in the open position. Pod hold-down latches
are synchronized by adjusting the Flag Sensor.
Conditions that would require this adjustment are:
Tools
Allen wrench (or hex driver), 3/32 inch
Allen wrench (or hex driver), 1/8 inch
Other Material
PC compatible computer running ISIM
Null-modem communications cable
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