Asyst Technologies VersaPort 2200 - Preventive Service Procedures

Page 42 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 2: Theory of Operation
Specifications and Outline Drawing
a
FIGURE 18 VersaPort Terms
Port Door
User/operator side
Vertical
Drive
Column
Port Plate
Connector
Panel
(behind
minienviron-
ment shield)
Process-Tool
Side (front)
Minienvironment
Copper
Interlock Pin
Provisions