Released Rev. C 2000-1252-01 Page 77
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical View
a
CAUTION
THE MINIENVIRONMENT CAN BE EASILY DAMAGED BY
MIS-HANDLING. USE CAUTION WHEN REMOVING AND
REPLACING THE MINIENVIRONMENT.
_____2. The minienvironment is attached to the port plate in a track just below the
plate’s top edge. Grab the minienvironment at both sides and gently pull away
from the port plate. Hold both pieces of the shield to avoid the inner shield
falling as the minienvironment is removed. Set the minienvironment aside.
_____3. Loosen the two captive Phillips screws securing the connector cover panel to
the VersaPort base. Set cover aside. Disconnect power, communications, and
ground cable from the VersaPort.
Service
_____1. Connect a PC with null modem cable to the Host port of the VersaPort.
Connect 24vdc power. Use ISIM software to test the operation of the
VersaPort. For information on using the software, see “Appendix A: ISIM” on
page 123.
_____a. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to
select LPO/VersaPort and press Enter.
_____2. Place a SMIF-Pod and cassette with at least one product-type test on the
VersaPort port plate.
_____3. Command the VersaPort to raise to the Stage position to allow sensor
adjustment:
NOTE . . .
THE VERSAPORT SOFTWARE MAY PERFORM A HOMING CALIBRATION BEFORE
MOVING THE VERSAPORT TO THE STAGE POSITION.
_____a. From the MAIN Menu select F1 (AUTO).
_____b. From the AUTO Menu select F1 (STAGE).
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