Released Rev. C 2000-1252-01 Page 73
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
Adjust Protrusion Mirror
_____1. Use a 0.050-inch Allen wrench to adjust Wafer Protrusion Mirror adjustment
screws. Visually verify that the laser beam is hitting directly on the center of
the wafer protrusion sensor.
NOTE . . .
IF THE ADJUSTMENT SCREWS ARE TIGHT AND THE BEAM DOES NOT MOVE,
LOOSEN THE TWO SCREWS WITH SPRINGS ATTACHED APPROXIMATELY
ONE-QUARTER TURN.
_____2. Adjust the Wafer Protrusion Mirror screws to align the beam onto the
Protrusion Sensor. The DAC value displayed must be less than 30.
_____3. When the beam is centered on the Alignment Tool slot nearest to the
Protrusion Mirror and the Wafer Protrusion DAC value is less than 30, tighten
bottom screw with spring until the screw is tight and the spring coils touch. Do
not over-tighten.
_____4. Check DAC value again. If it is 255, repeat the mirror adjustments.
_____5. If the DAC value is less than 30 and the beam is centered on the Alignment
Tool, tighten the top screw with spring until the screw is tight and the spring
coils touch. Do not over-tighten.
_____6. Check DAC value again. If the DAC value is less than 30 and both screws with
springs are tight, continue.
_____7. If the DAC value is 255, loosen the top springed screw and use the adjustment
screws to lower the DAC value below 30. Tighten the top springed screw after
adjustment.
Verify DAC Values and Operation
NOTE . . .
REPLACE THE LASER BRACKET COVER IF IT WAS REMOVED TO ADJUST THE
MIRRORS. ALL DAC VALUES MUST BE VERIFIED AFTER COVER IS MOUNTED.
_____1. With the Alignment Tool removed, check the DAC values for all three sensors
individually. Verify they are all less than 30. If necessary, use adjustment
screws to align beamsplitters or mirrors as described previously while the
DAC value is displayed. It should not be necessary to adjust screws with
springs.
_____2. Press F4 (DAC). Use the arrow keys to select Sensor Alignment and press
Enter. Use the arrow keys to select Wafer Sensor and press Enter. A window
will display the DAC value. Press F4 to stop calibration.
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