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Describes the step-by-step process for VersaPort operation, starting from the Home position.
Details the sequence of events for positioning a cassette for wafer transfer.
Explains how to perform and interpret the VersaPort's self-test diagnostics.
Lists and describes the main mechanical and electronic parts of the VersaPort.
Describes the mechanical interface, lead screw, and wafer seating mechanisms.
Details the fixed and shuttle versions of the port door and its features.
Provides an overview of the central processing unit and interface boards.
Explains the power input, voltage monitoring, and power distribution.
Describes the universal asynchronous receiver transmitter for serial communication.
Details the optical sensors used for wafer and slot detection.
Lists the motors used for various functions like elevator, latch, and shuttle.
Introduces the chapter's focus on fault isolation and troubleshooting steps.
Provides instructions on using the ISIM software for diagnostics and configuration.
Offers guidance on identifying issues based on system indications and alarms.
Details the procedure for running the self-test to check system health.
Explains the classification of errors as recoverable or non-recoverable.
Describes the VersaPort product line covered in the manual.
Details the standard and shuttle versions of the VersaPort.
Lists optional features available for the VersaPort.
Explains the organization and content of each chapter and appendix.
Defines keyboard and text conventions used throughout the manual.
Explains the meaning of danger, warning, and caution symbols used in the manual.
Outlines the customer's responsibility for complying with regulations.
Provides instructions for electrostatic discharge and electromagnetic interference prevention.
Details how electrical power is supplied and controlled via the EMO switch.
Describes the safety steps for locking out equipment during service.
Highlights hazards and precautions related to the VersaPort's laser system.
Refers to compliance with seismic requirements for installation.
Identifies potential pinch hazards and their locations.
Describes the various labels and their locations on the VersaPort.
Emphasizes the importance of safety information before performing any service.
Provides general safety guidelines for personnel working with the equipment.
Outlines precautions related to electrical hazards during service.
Details safety measures concerning mechanical hazards and moving parts.
Advises on safe handling of chemicals and ventilation.
Lists tools needed for service tasks and how to obtain special tools.
Provides considerations for removing and reinstalling the VersaPort.
Outlines routine maintenance tasks to ensure system performance.
Details procedures for calibrating and aligning system components.
Lists procedures for replacing failed or malfunctioning components.
A list of menus and functions available within the ISIM software.
Introduces the chapter on communication methods with the host system.
Details the SECS communication protocol, guidelines, and message formats.
Explains the ASCII protocol for communication when SECS is not supported.
Describes parallel communication methods and control signals.
Lists available wiring diagrams and assemblies with their corresponding page numbers.
General| Category | Industrial Equipment |
|---|---|
| Manufacturer | Asyst Technologies |
| Model | VersaPort 2200 |
| Wafer Size | 200mm |
| Interface | SECS/GEM |
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