Asyst Technologies VersaPort 2200 User Manual (English)

Safety Requirements75
- General Safety75
- Electrical Safety76
- Mechanical Safety76
- Chemical Safety76
Tool Requirements76
Notes on Removing and Replacing Versaport77
Preventive Service Procedures78
PSP1 - Verify Laser Sensor DAC Values79
- Verify DAC Values and Operation79
Calibration/Alignment Procedures81
CAP1 - Align Laser Detector System82
- Pre-Service82
- Remove Minienvironment82
- Service83
- Adjust Laser Beam Orientation83
- Figure 19 Laser Detector System (Bottom View)84
- Figure 20 Laser Beam Orientation84
- Adjust Wafer Sensor Beam85
- Figure 21 Laser Bracket Assembly85
- Figure 22 Spring Tension86
- Adjust Slot Sensor Beam87
- Adjust Corner Mirror88
- Figure 23 Mirror Adjustment88
- Adjust Wafer Protrusion Sensor89
- Adjust Mirrors90
- Adjust Protrusion Mirror91
- Verify DAC Values and Operation91
- Post-Service93
CAP2 - Align Excessive Wafer Protrusion Sensor, Vertical View94
- Pre-Service94
- Remove Minienvironment94
- Service95
- Service96
- Figure 24 Wafer Excessive Protrusion Sensor96
- Post-Service97
- Figure 25 Excessive Protrusion Sensor97
CAP3 - Align Wafer Seater Mechanism99
- Pre-Service99
- Remove Minienvironment99
- Service100
- Figure 26 Wafer Seater Mechanism, Top View100
- Figure 27 Wafer Seater Mechanism, Side View101
- Figure 28 Wafer Seater Mechanism, Bottom View102
- Post-Service104
CAP4 - Calibrate Shuttle Homing Offset105
- Pre-Service105
- Service105
- Adjust Cassette Shuttle Home Position107
- Post-Service109
CAP5 - Align Pod Hold down Latches110
- Pre-Service110
- Service110
- Post-Service111
CAP6 - Align Pod-In-Place Switch112
Figure 29 200Mm Port Door (Bottom View), Pod in Place Switch113
Figure 30 200Mm Port Plate Pod-In-Place Switch (Side and Top Views)114
Corrective Service Procedures116
CSP1 - Pod Latch Motor Replacement117
- Pre-Service117
- Service117
- Post-Service119
CSP2 - Pod Door Lock Motor Replacement120
- Pre-Service120
- Remove Minienvironment120
- Service121
- Figure 31 Gasket Inside Port Door Cover123
- Figure 32 Routing Cable through Opening in Port Door Cover123
- Post-Service124
CSP3 - Laser Diode Replacement125
- Pre-Service125
- Post-Service126
CSP4 - Cassette Shuttle Motor Replacement127
- Remove Minienvironment127
- Service128
- Post-Service129
CSP5 - Vertical Drive Motor Replacement131
- Pre-Service131
- Service131
- Post-Service133
CSP6 - Replace Printed Circuit Board134
Figure 33 Versaport Base, Connector Panel134
Figure 34 Versaport Bottom Plate, Screw Locations135
Figure 35 Versaport Circuit Board137

Appendix A: ISIM141

Appendix B: Communications Software155

Appendix C: Material Safety Data Sheets221

Appendix D: Wiring Diagrams and Drawings225

Brand	Asyst Technologies
Model	VersaPort 2200
Category	Industrial Equipment
Language	English

Asyst Technologies VersaPort 2200 User Manual

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Asyst Technologies VersaPort 2200 Specifications