Released Rev. C 2000-1252-01 Page vii
a
Acronyms
BOM Bill of Materials
CAP Corrective Action Procedure
CSP Corrective Service Procedure
ECN Engineering Change Notice
IR Infrared
ISIM Indexer Simulation Software
MCBF Mean Cycles Between Failures
MRP Multiple Reticle Pod
MSC Micro Station Controller
PIO Parallel Input/Output
P/N (or PN) Part Number
PSP Preventive Service Procedure
RFID Radio Frequency Identification
SAM Smart Arm Master
To Next Page
Loading...