Page 10 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 1: Safety
Laser Safety
a
WARNING
LASER HAZARD
THE LASER INTERLOCK IS BYPASSED WHEN USING ISIM
SOFTWARE IN MANUAL (SERVICE) MODE. DO NOT STARE INTO
LASER BEAM. STARING INTO THE LASER BEAM MAY RESULT IN
EYE INJURY OR BLINDNESS.
WARNING
MECHANICAL HAZARD
USAGE OF ISIM CAN PUT THE LOAD PORT IN AN UNSAFE
MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED.
L
ASER EXPOSURE HAZARDS AND PINCH HAZARDS MAY BE
PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY
FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS
AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS
EQUIPMENT. FAILURE TO COMPLY MAY RESULT IN INJURY OR
MECHANICAL DAMAGE.
Seismic
Follow all installation procedures to ensure compliance with S2-0200; Safety Guidelines
For Semiconductor Manufacturing Equipment, Seismic Requirements.
Pinch Points
A pinch hazard exists at the port plate when the VersaPort is being serviced and the
minienvironment is removed—or when no Pod is present. Pinch points are identified by
labels near the pinch-point hazard. See Figure 1 on page 15 or Figure 3 on page 16 for
the location of the pinch hazard labels.
WARNING
MECHANICAL HAZARD
THE USER MUST NEVER PLACE FINGERS OR HANDS ON ANY
PART OF THE VERSAPORT WHILE IT IS OPERATING. FAILURE
TO COMPLY MAY RESULT IN BODILY INJURY.
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