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Asyst Technologies VersaPort 2200 - Post-Service

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Released Rev. C 2000-1252-01 Page 75
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
_____9. Remove 24 vdc power and communications cable from the VersaPort.
Post-Service
_____1. If necessary, return the VersaPort to the Process Tool.
_____2. Reinstall the minienvironment shield.
_____3. The procedure is complete when the VersaPort has been remounted to the
Process Tool—with the minienvironment reinstalled—and has been
Autocycled ten times.

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