Page 124 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Appendix A: ISIM
Indexer Simulator (ISIM) Menu List
a
FIGURE 37 F1 – AUTO Menu
T
ABLE 11 Auto Mode
F Key Main Menu F Key Sub Menu Menu Options Explanation
F1
AUTO F1 STAGE
(OPEN)
Directs elevator to open stage from
current position.
F2 HOME Directs VersaPort (elevator) to HOME.
F3 FIND WAFER Next Moves elevator down to next
reticle/wafer.
Previous Moves elevator up to previous
reticle/wafer.
Get Wafer Map Directs open stage from any position.
F4 FIND SLOT Next Moves elevator down to next empty slot.
Previous Moves elevator up to previous empty slot.
Specify Slot Moves elevator to specified slot.
F5 GOTO POS Absolute
Position
Moves elevator down to entered position
from port plate.
Relative
Distance
Moves elevator up or down a relative
distance from current position.
F6 DC MOTOR Lock Port Locks port door.
Unlock Port Unlocks port door.
Reseat Wafer Disabled for reticles.
F7 TWEEK Tweek up Moves elevator up 10 mils.
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