Page 72 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
_____4. Wait for the message from the VersaPort. The message should read:
Sensor calibration in progress: PROTRUDE
Adjust sensor until threshold is <30
Press F4 key to stop calibration
DAC #2 threshold = xx
(where xx is the DAC threshold value of the sensor and can range anywhere
from 0 to 255.)
_____5. If the displayed value is less than 30, no further adjustment of the wafer
protrusion sensor is necessary.
_____6. If the displayed DAC threshold value is 30 or greater, the beam is not
contacting the wafer protrusion sensor. Continue with the steps below.
Adjust Mirrors
_____1. Verify the Laser Beam is approximately centered in the Protrusion Mirror, as
shown in Figure 23 on page 70.
NOTE . . .
IF THE ADJUSTMENT SCREWS ARE TIGHT AND THE BEAM DOES NOT MOVE,
LOOSEN THE TWO SCREWS WITH SPRINGS ATTACHED APPROXIMATELY
ONE-QUARTER TURN.
_____2. Tighten bottom screw with spring until the screw is tight and the spring coils
touch. Do not over-tighten.
_____3. Verify that the beam is still aligned to the wafer protrusion sensor. Turn the
adjustment screws if required.
_____4. With the beam centered and the bottom screw with spring tight, tighten the top
screw with spring until the screw is tight and the spring coils touch. Do not
over-tighten.
_____5. Verify again that the beam is still aligned to the wafer protrusion sensor. If it is
not, make any small adjustments necessary by turning the adjustment screws
only.
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