Asyst Technologies VersaPort 2200 - Figure 5 Versaport Components (Standard)

Released Rev. C 2000-1252-01 Page 19
VersaPort 2200 Technical Manual
Chapter 2: Theory of Operation
a
FIGURE 5 VersaPort components (standard)
Cassette
shuttle and
motor in base
Fan motor
in base
Connector panel behind
minienvironment shield
Rear shroud
Vertical drive column (lead
screw) with motor in base
Smart-Probe
embedded in port
p
late
Port plate
assembly