Released Rev. C 2000-1252-01 Page 81
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP3 – Align Wafer Seater Mechanism
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CAP3 – Align Wafer Seater Mechanism
Pre-Service
NOTE . . .
WAFER SEATER MECHANISM ALIGNMENT MAY BE PERFORMED WITH THE
V
ERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH
ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A
SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE
MINIENVIRONMENT SHIELD.
Remove minienvironment
_____1. Remove the outer shields of the minienvironment by loosening the four screws
at the top of the port plate. Do not remove screws.
CAUTION
THE MINIENVIRONMENT CAN BE EASILY DAMAGED BY
MIS-HANDLING. USE CAUTION WHEN REMOVING AND
REPLACING THE MINIENVIRONMENT.
_____2. The minienvironment is attached to the port plate in a track just below the
plate’s top edge. Grab the minienvironment at both sides and gently pull away
from the port plate. Hold both pieces of the shield to avoid the inner shield
falling as the minienvironment is removed. Set the minienvironment aside.
_____3. Loosen the two captive Phillips screws securing the connector cover panel to
the VersaPort base. Set cover aside. Disconnect power, communications, and
ground cable from the VersaPort.
Tools
Allen wrench (or hex driver), 1/16 inch
Allen wrench (or hex driver), 5/64 inch
Allen wrench (or hex driver), 3/32 inch
Screwdriver, Phillips, No. 2
Other Material
Loctite 222 adhesive
SMIF Pod with cassette and test wafer
PC compatible computer running ISIM
Null-modem communications cable
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