Asyst Technologies VersaPort 2200 - Corrective Service Procedures

Page 80 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical View
a
_____3. The procedure is complete when the VersaPort has been remounted to the
Process Tool—with the minienvironment reinstalled—and has been
Autocycled ten times.